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<p class="MsoNormal">Shawn, our facility runs a completely separate Silane exhaust line that is not connected in any manner with our independent acids or solvent exhaust systems.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Cheers!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Julia Aebersold, Ph.D. <o:p></o:p></p>
<p class="MsoNormal">MNTC Cleanroom Manager<o:p></o:p></p>
<p class="MsoNormal">Shumaker Research Building, Room 233<o:p></o:p></p>
<p class="MsoNormal">2210 South Brook Street<o:p></o:p></p>
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
<p class="MsoNormal">Louisville, KY 40292<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">502-852-1572<o:p></o:p></p>
<p class="MsoNormal">http://louisville.edu/micronano/<o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Shawn Wagoner<br>
<b>Sent:</b> Thursday, June 27, 2013 2:40 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] silane in gas cabinet<o:p></o:p></span></p>
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<p class="MsoNormal">Hello,<o:p></o:p></p>
<p class="MsoNormal"> Here in my lab we have a PECVD system that uses 2%silane in argon. The cylinder is in a cabinet in the service chase. The silane shares this cabinet with a bottle of ammonia. The cabinet is connected to the general exhaust
that is used throughout the lab. I don’t really like the setup but this is how the system was running when I was hired and came to the university. This setup is different from my industrial experience where the silane was outdoors in a bunker.
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<p class="MsoNormal">The lab will be moving to a larger cleanroom space. While I will not have an outdoor bunker at the new facility, I will take this opportunity to improve the situation. I intend to purchase a new cabinet for the 2%silane that will allow
me to use a cylinder with a pneumatic valve, DISS fitting and a dedicated purge cylinder. This is more in line with my prior experience. Are there any concerns or issues with connecting the cabinet to the common exhaust? Again this new lab only has general
exhaust that runs throughout the entire lab. <o:p></o:p></p>
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<p class="MsoNormal">Thanks<o:p></o:p></p>
<p class="MsoNormal">Shawn Wagoner<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Shawn Wagoner<o:p></o:p></p>
<p class="MsoNormal">Director<o:p></o:p></p>
<p class="MsoNormal">Nanofabrication Laboratory at Binghamton University<o:p></o:p></p>
<p class="MsoNormal">607-777-6131<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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