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</o:shapelayout></xml><![endif]--></head><body lang=EN-AU link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='color:#1F497D'>Hi Rick,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>We do not have direct experience with Se. Se MSDS does not indicate extreme hazard.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>We had a few years ago a user who used our sputter for depositing Ga2Se3 and GeSe2. We realised that when opening the chamber a very unpleasant smell was present and concerns raised whether H2Se was formed but unfortunately we couldn’t detect it (maybe detector didn’t have sufficient sensitivity). We also tried to sputter Al after the Se-compound to seal it but this hasn’t worked out as smell persisted. <o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Besides the smell I don’t know if this may cause any contamination issue to other deposition processes. You need to investigate possible reactions of Se with air/H2O.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>It is not much but hope it helps a bit,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Fouad Karouta<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>*********************************<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Manager ANFF ACT Node<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Research School of Physics and Engineering<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Australian National University<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>ACT 0200, Canberra, Australia<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Tel: + 61 2 6125 7174<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Mob: + 61 451 046 412<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Email: fouad.karouta@anu.edu.au<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0cm 0cm 0cm'><p class=MsoNormal><b><span lang=EN-US style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span lang=EN-US style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Morrison, Richard H., Jr.<br><b>Sent:</b> Wednesday, 3 July 2013 8:08 PM<br><b>To:</b> labnetwork@mtl.mit.edu<br><b>Subject:</b> [labnetwork] evaporation question<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span lang=EN-US>HI,<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-US>I have a user requesting to evaporate Selenium, has anybody done that? Looking for info on hazards and rough process information.<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-US>Thanks<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><br>Rick<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-US>Draper Laboratory<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US>Group Leader Microfabrication Operations<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US>555 Technology Square<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US>Cambridge Ma, 02139-3563<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-US><a href="http://www.draper.com">www.draper.com</a><o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US>W 617-258-3420<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US>C 508-930-3461<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p></div></body></html>