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<p class="MsoNormal">I agree with Steve. Its usually attributed to either a dirty chamber or leaky current and make sure that resistance is as high as possible.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Cheers!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Julia Aebersold, Ph.D. <o:p></o:p></p>
<p class="MsoNormal">MNTC Cleanroom Manager<o:p></o:p></p>
<p class="MsoNormal">Shumaker Research Building, Room 233<o:p></o:p></p>
<p class="MsoNormal">2210 South Brook Street<o:p></o:p></p>
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
<p class="MsoNormal">Louisville, KY 40292<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">502-852-1572<o:p></o:p></p>
<p class="MsoNormal">http://louisville.edu/micronano/<o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Paolini, Steven<br>
<b>Sent:</b> Friday, July 12, 2013 10:40 AM<br>
<b>To:</b> Errol V. Porter; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] STS multiplex ASE high coil reflectance issues<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Errol, can you tune it manually? If so, something is interfering with the movement of the air caps. If you think both air (or vacuum) caps are freely turning and you can’t tune it manually, remove the UHF cable
from the generator to the match and using an ohmmeter, measure resistance from ground to the electrode, it should be 2 megohm or higher. If the resistance is lower, start removing parts such as shields and keep measuring till you find the short. Another avenue
is to make sure the chuck RF is tuning, a mismatch of 20% or greater will create havoc for the coil tuning. Best of luck,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"> Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"> Equipment Dood<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Errol V. Porter<br>
<b>Sent:</b> Thursday, July 11, 2013 5:17 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] STS multiplex ASE high coil reflectance issues<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Greetings,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are trying to troubleshoot a problem with our STS ASE system generating nearly a 30% reflectance on the coil power. We have tested the supply using a dummy load with no problems. We have cleaned the inner ceramic shield and he reflectance
remains. Any assistance you may have would be greatly appreciated.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Errol Porter<o:p></o:p></p>
<p class="MsoNormal">University of Arkansas / HiDEC<o:p></o:p></p>
<p class="MsoNormal">700 W. Research Center Blvd<o:p></o:p></p>
<p class="MsoNormal">Fayetteville, AR 72701<o:p></o:p></p>
<p class="MsoNormal">Tel. (479) 575-2519<o:p></o:p></p>
<p class="MsoNormal">Mobile: (479) 236-0693<o:p></o:p></p>
<p class="MsoNormal">Fax (479) 575-2719<o:p></o:p></p>
<p class="MsoNormal">email:<span style="color:#1F497D"> <a href="mailto:evporte@uark.edu">
evporte@uark.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://www.hidec.uark.edu/">http://www.hidec.uark.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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