<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40"><head><meta http-equiv=Content-Type content="text/html; charset=iso-8859-1"><meta name=Generator content="Microsoft Word 12 (filtered medium)"><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
span.EmailStyle17
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:windowtext;}
span.EmailStyle18
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.EmailStyle19
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='color:#1F497D'>We also have this Modutek bath at UCSB for our heated KOH and have been satisfied with the results. The drains valves need cleaning periodically, but that is not uncommon.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Thanks, Tom<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#1F497D'>--------------------------------------------------------------<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#1F497D'>Tom Reynolds, Lab Manager<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#1F497D'>UCSB Nanofabrication Facility<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#1F497D'>Electrical and Computer Engineering Dept.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#1F497D'>Engineering Science Bldg #225, Room 1109E<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#1F497D'>Santa Barbara, CA 93106<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#1F497D'>805-893-3918 x215 office<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#1F497D'>805-451-3979 cell<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#1F497D'>805-893-3918 fax<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#1F497D'>reynolds@ece.ucsb.edu<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Kuhn, Jeffrey G<br><b>Sent:</b> Tuesday, July 23, 2013 4:32 AM<br><b>To:</b> 'Tony L Olsen'; labnetwork@mtl.mit.edu<br><b>Subject:</b> Re: [labnetwork] KOH Tank Design<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span style='color:#1F497D'>Tony,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>A couple of years ago we installed a dedicated KOH bath inside a fume hood for some of our research folks. The bath is made by Modutek and is electrically heated. The tank itself is quartz and has a Teflon liner. There is also a coil of tubing around the top that flows cold water in order to condense vapors and return them to the tank. The tank uses a magnetic stirrer (air or N2 powered) for stirring. We had some issues initially with the tank as supplied but those issues have been resolved.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Please feel free to contact me privately if you’d like more details.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Regards,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:12.0pt;color:#1F497D'>Jeff Kuhn<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Facility Engineer<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Birck Nanotechnology Center<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Purdue University<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>1205 W. State St.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>West Lafayette, IN 47907<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Ph: (765) 496-8329<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Fax: (765) 496-2018<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal style='margin-left:.5in'><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> <a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>] <b>On Behalf Of </b>Tony L Olsen<br><b>Sent:</b> Monday, July 22, 2013 6:03 PM<br><b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><b>Subject:</b> [labnetwork] KOH Tank Design<o:p></o:p></span></p></div></div><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p><p class=MsoNormal style='margin-left:.5in'>Dear Labnetwork<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p><p class=MsoNormal style='margin-left:.5in'>We are building a new wet bench and would like to include a dedicated KOH etch bath to replace the current methodology of glassware with stir bars on a hotplate. We generally use a bath of 80°C.<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'>Our wetbench vendor initially quoted a recirculated bath in a stainless steel tank. We are concerned about the stainless, nor do we believe the Teflon or PVDF wetted surfaces in the proposed diaphragm pump will hold up to the hot KOH. Another option we are aware of is a quartz tank heated externally by recirculated water. I’m certain there are other options, too.<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'>Can you share your experience with dedicated KOH baths? What is the configuration? What are the materials? How do you mix/stir the bath? What problems have you experienced? What would you do next time?<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p><p class=MsoNormal style='margin-left:.5in'>Thank You,<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'>tonyO<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p><p class=MsoNormal style='margin-left:.5in'>Tony Olsen<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'>Nanofab Cleanroom Supervisor/Process Engineer<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'>36 S Wasatch Dr, Suite 2500 SMBB<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'>Salt Lake City, UT 84112<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'>801-587-0651 office<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'>801-587-3077 fax<o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'><a href="http://www.nanofab.utah.edu/"><span style='color:#6666CC'>www.nanofab.utah.edu</span></a><o:p></o:p></p><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p></div></body></html>