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<div class="moz-cite-prefix">Chandrashekar S Kambar,<br>
Lab Network is primarily for operations discussions<br>
or facility wide issues rather than detailed nanofabrication
questions.<br>
Please consider the mems talk venue for<br>
questions at this level of process detail.<br>
I also encourage you to contact Process Support<br>
at CHA Industries<br>
<a class="moz-txt-link-freetext" href="http://www.chaindustries.com/">http://www.chaindustries.com/</a><br>
<br>
I welcome dissenting opinion from the network<br>
if I have misrepresented our forum.<br>
<br>
Thank you<br>
Bill Flounders<br>
UC Berkeley<br>
<br>
<br>
<br>
Chandrashekar S Kambar wrote:<br>
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<blockquote
cite="mid:CAP+SBAofRxkw7zOVEBnnP1t+2CCP2_WZdRqvggGCSvdvsUM79w@mail.gmail.com"
type="cite">
<p>Hi,<br>
<br>
We are trying to optimize Ni with E-Beam Evaporator (TECPORT). <br>
<br>
The E-Beam power is raised in two steps: RAISE 1, SOAK 1 AND
RAISE 2, SOAK 2.<br>
ELECTRON BEAM PATTERN: Focused to one point (to the middle of
the crucible).<br>
CRUCIBLE: Graphite.<br>
<br>
ISSUE: During the RAISE 1, everything seems to be normal and
only the material in the middle of the crucible gets melted.
During the RAISE 2 the material starts to spit out of the
crucible. During the deposition the spitting increases
drastically, thus we will be forced to stop the deposition.
After the deposition when we take out the crucible, crucible was
broken across the wall. However there was no damage done to the
pocket holder (Hearth). <br>
<br>
Power % : Raise 1: 5% (V= 6.99 KV and I ~ 70 mA)<br>
Raise 2: 10% (V= 6.99 KV and I ~ 120 mA)<br>
During the deposition Power % goes up to 16% and
the current goes up to 180 mA ( V = 6.99 KV constant).<br>
<br>
We need to know, if there is any way to reduce the crucible
cracking and to avoid the spitting of the material. <br>
<br>
QUESTION 2:<br>
<br>
During the deposition the crucibles are cracked and its pieces
are stuck with the Ni material. Is there any way to recover the
material by removing the graphite pieces?</p>
<p>Thanks and Regards,<br>
Chandrashekar S Kambar.</p>
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