<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
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<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
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<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
@font-face
{font-family:"Arial Narrow";
panose-1:2 11 6 6 2 2 2 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoPlainText, li.MsoPlainText, div.MsoPlainText
{mso-style-priority:99;
mso-style-link:"Plain Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Arial Narrow","sans-serif";
color:#244061;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
span.PlainTextChar
{mso-style-name:"Plain Text Char";
mso-style-priority:99;
mso-style-link:"Plain Text";
font-family:"Arial Narrow","sans-serif";
color:#244061;}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri","sans-serif";}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple">
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<p class="MsoPlainText">Hello Dean,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">I asked my Ops Manager how he dealt with BCl3 in a production Fab. He was the gas manager for ON Semi for 15 years, and has used BCl3, without issue, for most of his tenure there.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Here's what I got from him:<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Chill the cylinders to 65F, remove regulators from the gas cabinet, temp control line from gas cabinet to VMB( 77 F +- 3F.) Regulators should be installed in VMB to reduce line pressure from VMB to Tool, temp from VMB to tool to around
83F+- 4F. Basically an increase in line temp from source to point of use and a decrease in pressure this system will flow flawlessly at distances upwards of 5 to 600'. I would recommend using 3/8" tubing from the gas cabinet to the VMB. After that it doesn't
matter on size unless large amounts of BCL3 is used in process. The key factor is not using a regulator in the gas cabinet it is not necessary and will cause a heat sink. The VMB does not require temp control unless the environment its located in is below
ambient.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Hope it helps.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Sincerely,</span><span style="font-family:"Arial Narrow","sans-serif";color:#244061"> </span><span style="font-family:"Times New Roman","serif";color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman","serif";color:#244061"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Tom Britton</span><span style="font-family:"Times New Roman","serif";color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Director of Sales</span><span style="font-family:"Times New Roman","serif";color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:14.0pt;font-family:"Arial Narrow","sans-serif";color:#244061">Critical Systems, Inc.</span></i><span style="font-size:14.0pt;color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Direct: 208-890-1417<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Office: 877-572-5515<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://www.criticalsystemsinc.com/"><i><span style="font-size:10.0pt;font-family:"Arial Narrow","sans-serif";color:blue">www.CriticalSystemsInc.com</span></i></a><i><u><span style="font-size:10.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p></o:p></span></u></i></p>
<p class="MsoNormal"><i><u><span style="font-size:4.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p><span style="text-decoration:none"> </span></o:p></span></u></i></p>
<p class="MsoNormal"><span style="color:#1F497D"><img border="0" width="196" height="38" id="Picture_x0020_1" src="cid:image001.png@01CEA34A.77BFD0D0" alt="logo for email signature png"></span><span style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">-----Original Message-----<br>
From: labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] On Behalf Of Dean Sutter<br>
Sent: Tuesday, August 27, 2013 6:04 AM<br>
To: <labnetwork@mtl.mit.edu><br>
Subject: Re: [labnetwork] BCL3 - Gas Line Heaters and Protocols</p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Thanks to all for your responses.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">The information will be helpful.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Best regards<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">On 8/27/2013 6:07 AM, Morrison, Richard H., Jr. wrote:<o:p></o:p></p>
<p class="MsoPlainText">> Hi,<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> At Draper Laboratory we placed the BCL3 cabinet next to the tool. We did not want to bother with heated lines and all the plumbing involved. The closer the better.<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> Rick<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> Draper Laboratory<o:p></o:p></p>
<p class="MsoPlainText">> Group Leader Microfabrication Operations<o:p></o:p></p>
<p class="MsoPlainText">> 555 Technology Square<o:p></o:p></p>
<p class="MsoPlainText">> Cambridge Ma, 02139-3563<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> <a href="http://www.draper.com"><span style="color:#244061;text-decoration:none">www.draper.com</span></a><o:p></o:p></p>
<p class="MsoPlainText">> <a href="mailto:rmorrison@draper.com"><span style="color:#244061;text-decoration:none">rmorrison@draper.com</span></a><o:p></o:p></p>
<p class="MsoPlainText">> W 617-258-3420<o:p></o:p></p>
<p class="MsoPlainText">> C 508-930-3461<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> -----Original Message-----<o:p></o:p></p>
<p class="MsoPlainText">> From: <a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:#244061;text-decoration:none">labnetwork-bounces@mtl.mit.edu</span></a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:#244061;text-decoration:none">mailto:labnetwork-bounces@mtl.mit.edu</span></a>]
On Behalf Of Dean Sutter<o:p></o:p></p>
<p class="MsoPlainText">> Sent: Monday, August 26, 2013 3:10 PM<o:p></o:p></p>
<p class="MsoPlainText">> To: <<a href="mailto:labnetwork@mtl.mit.edu"><span style="color:#244061;text-decoration:none">labnetwork@mtl.mit.edu</span></a>><o:p></o:p></p>
<p class="MsoPlainText">> Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen<o:p></o:p></p>
<p class="MsoPlainText">> Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> Hello,<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> We have been internally debating the necessary protocols and physical installations necessary to ensure a safe and properly functioning delivery mechanism.<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing
up in the ceiling is our primary concern.<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> So, we are seeking a benchmark from existing facilities that use BCL3.<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> Anyone care to volunteer to explain their installation and operating/safety protocols?<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> Thanks<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> --<o:p></o:p></p>
<p class="MsoPlainText">> Dean A. Sutter<o:p></o:p></p>
<p class="MsoPlainText">> Associate Director,<o:p></o:p></p>
<p class="MsoPlainText">> Research Operations and Industry Engagements<o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> <a href="mailto:dean.sutter@ien.gatech.edu"><span style="color:#244061;text-decoration:none">dean.sutter@ien.gatech.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText">> 404 894 3847 - Office<o:p></o:p></p>
<p class="MsoPlainText">> 404 558 1844 - Cell<o:p></o:p></p>
<p class="MsoPlainText">> <a href="http://www.ien.gatech.edu"><span style="color:#244061;text-decoration:none">www.ien.gatech.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">><o:p> </o:p></p>
<p class="MsoPlainText">> _______________________________________________<o:p></o:p></p>
<p class="MsoPlainText">> labnetwork mailing list<o:p></o:p></p>
<p class="MsoPlainText">> <a href="mailto:labnetwork@mtl.mit.edu"><span style="color:#244061;text-decoration:none">labnetwork@mtl.mit.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText">> <a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">
<span style="color:#244061;text-decoration:none">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">-- <o:p></o:p></p>
<p class="MsoPlainText">Dean A. Sutter<o:p></o:p></p>
<p class="MsoPlainText">Associate Director,<o:p></o:p></p>
<p class="MsoPlainText">Research Operations and Industry Engagements<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><a href="mailto:dean.sutter@ien.gatech.edu"><span style="color:#244061;text-decoration:none">dean.sutter@ien.gatech.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText">404 894 3847 - Office<o:p></o:p></p>
<p class="MsoPlainText">404 558 1844 - Cell<o:p></o:p></p>
<p class="MsoPlainText"><a href="http://www.ien.gatech.edu"><span style="color:#244061;text-decoration:none">www.ien.gatech.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">_______________________________________________<o:p></o:p></p>
<p class="MsoPlainText">labnetwork mailing list<o:p></o:p></p>
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