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<p class="MsoPlainText">Dear Dean,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">At ANFF ACT Node we use BCl3 in our ICP system. Here follows the way we installed it:<o:p></o:p></p>
<p class="MsoPlainText" style="margin-left:36.0pt;text-indent:-18.0pt;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">1-<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>The cylinder is located in an individual exhausted gas cabinet located outside the lab in a dedicated gas shed. The SS tubing going to the ICP tool is argon welded (single line) and is about 10m long. No other appendages are used between
the gas panel in the gas cabinet and the gaspod of the tool.<o:p></o:p></p>
<p class="MsoPlainText" style="margin-left:36.0pt;text-indent:-18.0pt;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">2-<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>We have a low pressure (secondary side) pressure regulator with a reading of -4PSI (maybe the gauge is faulty). From the panel the SS tubing is heated at 30°C.<o:p></o:p></p>
<p class="MsoPlainText" style="margin-left:36.0pt;text-indent:-18.0pt;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">3-<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>We monitor the gas through three BCl3 sensors (from Bionics): one sampling the exhaust of the gas cabinet, one sampling the tool gaspod (exhaust) and one monitoring the open air around the system. Also we do have a shared gas sensor
(with Cl2) to monitor the exhaust of the dry scrubber (Clean Systems).<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Hope this is helpful.<o:p></o:p></p>
<p class="MsoPlainText">Regards, Fouad<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">*********************************<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Manager ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Research School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Australian National University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">ACT 0200, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Mob: + 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Email: fouad.karouta@anu.edu.au<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><span lang="EN-US" style="mso-fareast-language:EN-AU">-----Original Message-----<br>
From: labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] On Behalf Of Dean Sutter<br>
Sent: Tuesday, 27 August 2013 5:10 AM<br>
To: <labnetwork@mtl.mit.edu><br>
Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen<br>
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols</span></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Hello,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">We have been internally debating the necessary protocols and physical installations necessary to ensure a safe and properly functioning delivery mechanism.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing
up in the ceiling is our primary concern.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">So, we are seeking a benchmark from existing facilities that use BCL3.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Anyone care to volunteer to explain their installation and operating/safety protocols?<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Thanks<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">--<o:p></o:p></p>
<p class="MsoPlainText">Dean A. Sutter<o:p></o:p></p>
<p class="MsoPlainText">Associate Director,<o:p></o:p></p>
<p class="MsoPlainText">Research Operations and Industry Engagements<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><a href="mailto:dean.sutter@ien.gatech.edu"><span style="color:windowtext;text-decoration:none">dean.sutter@ien.gatech.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText">404 894 3847 - Office<o:p></o:p></p>
<p class="MsoPlainText">404 558 1844 - Cell<o:p></o:p></p>
<p class="MsoPlainText"><a href="http://www.ien.gatech.edu"><span style="color:windowtext;text-decoration:none">www.ien.gatech.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">_______________________________________________<o:p></o:p></p>
<p class="MsoPlainText">labnetwork mailing list<o:p></o:p></p>
<p class="MsoPlainText"><a href="mailto:labnetwork@mtl.mit.edu"><span style="color:windowtext;text-decoration:none">labnetwork@mtl.mit.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText"><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork"><span style="color:windowtext;text-decoration:none">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
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