<html><body><div style="color:#000; background-color:#fff; font-family:times new roman, new york, times, serif;font-size:12pt">This (free!) chapter from <span style="font-style: italic;">MEMS Materials and Processes Handbook</span> titled "Additive Processes for Semiconductors and Dielectric Materials" lists propane, ethylene, acetylene, disilabutane, tetramethylsilane, trimethylsilane, and trimethylaluminum as carbon sources. Methylsilane is an important one that they left out. If the link doesn't work, try searching for the chapter title and the pdf will be the first page listed.<br><br>http://www.google.com/url?sa=t&rct=j&q=&esrc=s&source=web&cd=1&ved=0CDAQFjAA&url=http%3A%2F%2Fwww.springer.com%2Fcda%2Fcontent%2Fdocument%2Fcda_downloaddocument%2F9780387473161-c1.pdf%3FSGWID%3D0-0-45-1102942-p173695513&ei=mIwzUpPtPM782gXb4ICwDw&usg=AFQjCNEUvzbTp8tR2HVNu2RVHSla8B6O5A<br><br><span
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Years of Business! 9/12/88 – 9/12/13</span></b><br><div><span><br></span></div><div><br></div> <div style="font-family: times new roman, new york, times, serif; font-size: 12pt;"> <div style="font-family: times new roman, new york, times, serif; font-size: 12pt;"> <div dir="ltr"> <hr size="1"> <font face="Arial" size="2"> <b><span style="font-weight:bold;">From:</span></b> "Morrison, Richard H., Jr." <rmorrison@draper.com><br> <b><span style="font-weight: bold;">To:</span></b> "<labnetwork@mtl.mit.edu>" <labnetwork@mtl.mit.edu> <br> <b><span style="font-weight: bold;">Sent:</span></b> Thursday, September 12, 2013 10:30 AM<br> <b><span style="font-weight: bold;">Subject:</span></b> [labnetwork] LPCVD SiC<br> </font> </div> <div class="y_msg_container"><br><meta http-equiv="x-dns-prefetch-control" content="off"><div id="yiv878765473">
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<div class="yiv878765473MsoNormal">Hi All,</div>
<div class="yiv878765473MsoNormal"> </div>
<div class="yiv878765473MsoNormal">I am planning a retro fit of our LPCVD stack, I want to remove LTO and replace with SiC. We have methane in the fab for our PECVD SiC process can I use that on an LPCVD process or is another feed gas better suited to SiC process?</div>
<div class="yiv878765473MsoNormal"> </div>
<div class="yiv878765473MsoNormal">Thanks in Advance.</div>
<div class="yiv878765473MsoNormal"><br>
Rick</div>
<div class="yiv878765473MsoNormal"> </div>
<div class="yiv878765473MsoNormal"> </div>
<div class="yiv878765473MsoNormal">Draper Laboratory</div>
<div class="yiv878765473MsoNormal">Group Leader Microfabrication Operations</div>
<div class="yiv878765473MsoNormal">555 Technology Square</div>
<div class="yiv878765473MsoNormal">Cambridge Ma, 02139-3563</div>
<div class="yiv878765473MsoNormal"> </div>
<div class="yiv878765473MsoNormal">www.draper.com</div>
<div class="yiv878765473MsoNormal">rmorrison@draper.com</div>
<div class="yiv878765473MsoNormal">W 617-258-3420</div>
<div class="yiv878765473MsoNormal">C 508-930-3461</div>
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