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<p class="MsoNormal">Lab Network Colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">In response to a labnetwork posting a few
months ago, proposing the use of
compressed dry air (CDA) in lieu of N2 for some drypump purging,
the UC Berkeley
NanoLab undertook a review of our dry-pumps. A total of 73
mechanical
pumps are in use in the NanoLab. Thirty six or ~ 50% of these are
drypumps which
require N2 purge. <br>
</p>
<p class="MsoNormal"><br>
The NanoLab nitrogen supply is derived from liquid nitrogen.
The N2 resource is a major expense for our operation. A rough
calculation shows
our N2 cost to be ~$100/yr/slpm (bulk N2 costs plus cryogenic
vessel support). Our average dry pumps consume ~35 slpm of N2 for
purging (note: some vendor-designed purge circuits are
process-driven meaning
N2 is used at high flow rates only during process).<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Our first effort was to review CDA vs. N2 with
our pump
manufacturers and with our pump rebuilders. Both gave us positive
reports about
the use of CDA in some applications. For obvious reasons the 19
pumps used to pump
flammables or pyrophoric gases were excluded from consideration.
This left the
pumps that support etchers, load-locks and high-vacuum systems. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Following a review of the dewpoint of the
NanoLab CDA (-75F
or ~ 6.5 ppm H2O weight/volume) a decision was made to further
exclude pumps
that pumped the “acid gases” (more specifically Cl2, BF3, HBr,
HCl, HF, SiCl4,
etc.). While the NanoLab CDA dryer can produce air at dewpoints
around -95F the
dryer’s shuttle-valve and check-valves must work significantly
harder to achieve this value thus
requiring more frequent maintenance and rebuilds. We have set our
CDA standard at -75F.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Eighteen 18 pumps were identified and converted
to CDA-purge. Our
initial results look good. A review of our N2 flow rates shows a
saving of
about 23%; average N2 flows decreased
from 2200 slpm to 1700 slpm saving us ~$50k per annum. So far, we
have seen no negatives from
this change. Our decision remains open to future review.<o:p></o:p></p>
<p class="MsoNormal"><span style="mso-spacerun:yes"> </span><o:p></o:p></p>
<p class="MsoNormal">As a footnote, we’ve also decided to add 25 psi
check valves
to the 90 psi N2 supply for the pumps that remain on N2-purge. The
reason for
this is we’ve found dry pumps will pump their N2 supply to
sub-ambient pressure
if the N2 supply is inadvertently interrupted. In some cases this
can have
negative repercussions.<span style="mso-spacerun:yes"> </span><o:p></o:p></p>
<p class="MsoNormal"><o:p> <br>
On behalf of the NanoLab equipment staff, regards,<br>
Bob Hamilton<br>
</o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<pre class="moz-signature" cols="72">--
Robert Hamilton
University of California at Berkeley
Marvell NanoLab
Equipment Eng. Mgr.
Room 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
<a class="moz-txt-link-abbreviated" href="mailto:bob@eecs.berkeley.edu">bob@eecs.berkeley.edu</a>
Phone: 510-809-8600
Mobile: 510-325-7557
e-mail preferred
</pre>
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