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<p class="MsoNormal">Greetings,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">As per Mark Heiden’s request, I am posting the one tool that fits the criteria described;<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">JEOL JBX 5500FS E-beam writer<o:p></o:p></p>
<p class="MsoListParagraph" style="margin-left:.75in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">A.<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>Piece, 50mm, & 100mm cassette’s available. (Last service 08/2013)<o:p></o:p></p>
<p class="MsoListParagraph" style="margin-left:.75in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">B.<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>PMMA primary resist used and characterized.<o:p></o:p></p>
<p class="MsoListParagraph" style="margin-left:1.25in;text-indent:-.25in;mso-list:l0 level2 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">a.<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>Primary mode – 4: 50kV, Aperture 2 {1 nA current}<o:p></o:p></p>
<p class="MsoListParagraph" style="margin-left:.75in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">C.<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>Utilizing Microsoft PC driven software for calibration, design and exposure.<o:p></o:p></p>
<p class="MsoListParagraph" style="margin-left:1.25in;text-indent:-.25in;mso-list:l0 level2 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">a.<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>Readily interchangeable to UNIX version for users experienced with that GUI<o:p></o:p></p>
<p class="MsoListParagraph" style="margin-left:.75in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">D.<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>LINKCAD 7.0 DXF to GDSII software conversion available on adjacent computer<o:p></o:p></p>
<p class="MsoListParagraph" style="margin-left:.75in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">E.<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>Recommended third party Beam exposure software not purchased<o:p></o:p></p>
<p class="MsoListParagraph" style="margin-left:.75in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">F.<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>In-house exposure, Cr/Au metallization and PG Remover lift off service available for samples in wafer form.<o:p></o:p></p>
<p class="MsoListParagraph" style="margin-left:1.25in;text-indent:-.25in;mso-list:l0 level2 lfo1">
<![if !supportLists]><span style="mso-list:Ignore">a.<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>Detailed in-situ traveler used during service available upon request.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Errol Porter<o:p></o:p></p>
<p class="MsoNormal">University of Arkansas / HiDEC<o:p></o:p></p>
<p class="MsoNormal">700 W. Research Center Blvd<o:p></o:p></p>
<p class="MsoNormal">Fayetteville, AR 72701<o:p></o:p></p>
<p class="MsoNormal">Tel. (479) 575-2519<o:p></o:p></p>
<p class="MsoNormal">Mobile: (479) 236-0693<o:p></o:p></p>
<p class="MsoNormal">Fax (479) 575-2719<o:p></o:p></p>
<p class="MsoNormal">email:<span style="color:#1F497D"> <a href="mailto:evporte@uark.edu">
<span style="color:blue">evporte@uark.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://www.hidec.uark.edu/"><span style="color:blue">http://www.hidec.uark.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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