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Hi Mike,<br>
<br>
This is Mac Hathaway at Harvard. I'm not familiar with that oil,
but we use Fomblin-type "O2 Service" oil. What is the make of your
ALD system? Does it use a constant N2 or Ar purge? If not, I can
easily imagine a fair amount of backstreaming over time. In our
Cambridge Nanotech (Ultratech, now) Savannah, we run 20 sccm of N2
all the time.<br>
<br>
Also, if yours is a shared use facility, never discount the
possibility of strange things being introduced into the chamber by
"less experienced" users...<br>
<br>
<br>
Mac<br>
<br>
<br>
On 10/23/2013 3:13 PM, Michael Call wrote:
<blockquote
cite="mid:CADjUyUyMuZa8i4FkBW3Htrg2HwY4p-7Q-_WYDHt4AUC17zrEyQ@mail.gmail.com"
type="cite">
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<div dir="ltr">We have a thermal ALD system that has an Alcatel
2063C2 pump with Anderol 555(A155) oil for fluid(no turbo). We
recently cleaned the system and noticed oil in the low points in
the chamber. Has anyone else had any experience with this oil?
The vapor pressure for the oil is 10^-3 mBar@100C which is
fairly high.
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<br>
-- <br>
Mike Call <br>
Research Engineer<br>
UMaine LASST<br>
207-581-3382
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