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<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Bill we also run 10% O2 with our SF6, too.<o:p></o:p></span></a></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Julia Aebersold, Ph.D.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">MNTC Cleanroom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">502-852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://louisville.edu/micronano/"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">http://louisville.edu/micronano/</span></a><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:windowtext">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:windowtext"> Bill Flounders [mailto:bill@eecs.berkeley.edu]
<br>
<b>Sent:</b> Wednesday, November 6, 2013 8:36 PM<br>
<b>To:</b> Bob Henderson; Aebersold,Julia W.; 'Ian Harvey'; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Bosch etch foreline and pump powder residue question...<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Bob,<br>
I don't expect this to resolve the issue. Some type<br>
of downstream deposit is the price of admission<br>
for any of our etch or deposition tools.<br>
However, I would like to open the following question:<br>
<br>
At UC Berkeley (and I presumed most other labs ?)<br>
we use 10% O2 with our SF6 etch step.<br>
This provides oxygen for minimizing sulfur<br>
build up in the foreline - we still get deposits but<br>
they are not as bad as with no O2. I had presumed this<br>
was common strategy. There is some decrease in selectivity<br>
due to resist erosion - but it has been worth it. Greater <br>
concentrations of O2 lead to too much resist loss.<br>
<br>
I welcome feedback on this recipe and encourage <br>
addition of some O2 if not using any.<br>
<br>
Bill Flounders<br>
UC Berkeley<br>
<br>
<br>
<br>
Bob Henderson wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Has anyone considered using an oxygen/fluorine plasma for removal of the polymer. Since most DRIE systems have an ICP source a fair amount of O/F will be generated
that can be used to etch away the carbon rich polymer maybe as far as the gate valve and turbopump. The reactive species probably won’t have a lifetime that will extend very far down the foreline but I have seen downstream plasmas that will go a few feet into
the foreline before extinguishing. Bob Henderson</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Aebersold,Julia W.<br>
<b>Sent:</b> Tuesday, November 05, 2013 10:50 AM<br>
<b>To:</b> Ian Harvey; <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Bosch etch foreline and pump powder residue question...</span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Ian, we noticed the same when we had to replace our turbo pump (very expensive) and were careful with the byproducts from the buildup from the etching process. It is recommended
and we installed a heater on the line from the roughing/backing pump to the turbo, so that the byproducts do not condense and are properly exhausted. The particles can also buildup on your foreline valve causing it to become stuck or not actuate.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Cheers!</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Julia Aebersold, Ph.D.
</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">MNTC Cleanroom Manager</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Shumaker Research Building, Room 233</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">2210 South Brook Street</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">University of Louisville</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Louisville, KY 40292</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">502-852-1572</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><a href="http://louisville.edu/micronano/">http://louisville.edu/micronano/</a></span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> </span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Ian Harvey<br>
<b>Sent:</b> Monday, November 04, 2013 6:36 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Bosch etch foreline and pump powder residue question...</span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<div>
<p class="MsoNormal">Dear Labnetwork colleagues,<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">We are installing a used STS DRIE tool acquired from the used tool market and used for Bosch-Si etch. <o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">We are unsettled by the large amount of white powder collected in the foreline and inside the large turbopump. The turbo is becoming unbalanced as flakes come off, and we are getting ready to trade in the large maglev pump for a refurb,
and clean the forelines.<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Does anyone have experience with what the powder is (F-C-S-O / EDS analysis attached), its risks, and how to safely manage it during pump removal, packing and declaration for shipping?<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Thanks!<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Ian<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica","sans-serif"">********************************************<br>
Ian R. Harvey, Ph.D.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica","sans-serif"">Associate Director, Utah Nanofab </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica","sans-serif""> &</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:13.5pt;font-family:"Helvetica","sans-serif"">Micron Microscopy Core</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica","sans-serif"">2511 SMBB (USTAR)</span><o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:9.0pt;font-family:"Helvetica","sans-serif"">University of Utah</span><o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:13.5pt"><span style="font-size:13.5pt;font-family:"Helvetica","sans-serif"">801/585-6162 (voicemail)<br>
801/581-5676 (lab main number)<br>
<a href="http://www.nanofab.utah.edu">www.nanofab.utah.edu</a></span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal"><br>
<br>
<br>
<o:p></o:p></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
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