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Rick:<br>
<br>
We use TEOS in a 500 cc quartz bubbler from Air Products (I don't
know if it is still called the Schumacher division). We also use
their temperature control and liquid level alarm unit. I think that
is one of the products in their Vapor Guard series.<br>
<br>
Let me know if you need any more detailed information ... I can
probably dig up the specific product number and/or price for the
TEOS bubblers that we use.<br>
<br>
Good luck,<br>
<br>
John <br>
<br>
On 12/2/2013 6:02 AM, Morrison, Richard H., Jr. wrote:
<blockquote
cite="mid:D3862732F46DEB4B93B4A7A80614D28814A56E11@mbx2.draper.com"
type="cite">
<p class="MsoNormal">Hi Everyone,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am adding TEOS to my PECVD tool and I am
looking for vendor recommendations on TEOS suppliers and the
temperature controlled heaters.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks in advance for your help.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
</blockquote>
<br>
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