<div dir="ltr">Hello,<div>at stanford's snf we have multiple systems from cambridge nanotech (now a division of ultratech). we've had a thermal ald system (Savannah) for several years. it is low maintenance and high uptime with great metal oxide performance. we also have their plasma assisted system (Fiji) which is able to do much more and delivers amazing nitride and pure metal films in addition to metal oxides. it is also high up time, although it is by nature a little more complicated. fall 2013, cambridge nanotech released a second generation of the savannah and the fiji with some changes that (in my opinion) make them nicer for shared use labs.</div>
<div><br></div><div>these are very popular tools at snf, and we've gotten great support from cambridge nanotech.</div><div><br></div><div>i could not recommend our brand of wafer saw.</div><div>j</div></div><div class="gmail_extra">
<br><br><div class="gmail_quote">On Fri, Jan 10, 2014 at 12:50 PM, Aebersold,Julia W. <span dir="ltr"><<a href="mailto:julia.aebersold@louisville.edu" target="_blank">julia.aebersold@louisville.edu</a>></span> wrote:<br>
<blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">We have a lovely Beneq ALD that is very nice and a Disco Dicing Saw.<br>
<br>
Cheers!<br>
<br>
Julia Aebersold, Ph.D.<br>
MNTC Cleanroom Manager<br>
Shumaker Research Building, Room 233<br>
2210 South Brook Street<br>
University of Louisville<br>
Louisville, KY 40292<br>
<br>
<a href="tel:502-852-1572" value="+15028521572">502-852-1572</a><br>
<a href="http://louisville.edu/micronano/" target="_blank">http://louisville.edu/micronano/</a><br>
<div class="HOEnZb"><div class="h5"><br>
-----Original Message-----<br>
From: <a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>] On Behalf Of Morrison, Richard H., Jr.<br>
Sent: Friday, January 10, 2014 7:25 AM<br>
To: Matthieu Nannini, Dr.; <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
Subject: Re: [labnetwork] Brand recommandation<br>
<br>
We purchased and have been operating a nice little R&D ALD tool from a company in Sudbury Mass called Arradiance unit is a GEMSTAR-8.<br>
<br>
A little caution here every 10um of deposition you have to clean the chamber by bead blasting and the source chemicals are expensive but overall it is 95% up time and the process is very stable.<br>
<br>
We have Disco dice saw the latest model and it is very good, model is DAD 3240 very good for our MEMS operation. Our MCM line uses ADT-7100. Both saws have >95% uptime with good service from both companies.<br>
<br>
<br>
Rick<br>
<br>
<br>
Draper Laboratory<br>
Principle Memeber of the Technical Staff Group Leader Microfabrication Operations<br>
555 Technology Square<br>
Cambridge Ma, 02139-3563<br>
<br>
<a href="http://www.draper.com" target="_blank">www.draper.com</a><br>
<a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><br>
W <a href="tel:617-258-3420" value="+16172583420">617-258-3420</a><br>
C <a href="tel:508-930-3461" value="+15089303461">508-930-3461</a><br>
<br>
<br>
<br>
<br>
-----Original Message-----<br>
From: <a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>] On Behalf Of Matthieu Nannini, Dr.<br>
Sent: Tuesday, January 07, 2014 4:38 PM<br>
To: <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
Subject: [labnetwork] Brand recommandation<br>
<br>
Dear colleagues,<br>
<br>
We received money to buy new tools in 2014 and, before you all get too busy in 2014, I would like to get your input (brand of choice) for the followings:<br>
- dicing saw<br>
- ICP for F processes<br>
- ALD<br>
- Laser direct writer<br>
- Developing station<br>
<br>
Thanks in advance<br>
<br>
Matthieu Nannini<br>
McGill Nanotools Microfab<br>
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<br>
<br>
<br>
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</div></div></blockquote></div><br></div>