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Onur Serbest,<br>
<br>
Re: E-beam and more general PVD tool cleanlieness management<br>
<br>
Onur,<br>
<br>
At Berkeley we manage PVD tool cleanliness with the use of
replaceable shielding. Our shields are fabricated from thin
stainless steel. We maintain at least two sets, one in the tool, the
other as a spare. We also use aluminum foil to sometimes cover these
shields and to cover areas where shields aren't practicable given
deposited films are line-of-sight.<br>
<br>
For health and safety reasons we do not allow our researchers to use
N2 blowguns to cleanup metal flakes common in a PVD process. It
seemed simplest for us to consider all metal aerosoles as hazardous
rather than to try and keep up on such issues. It seems half the
periodic table is getting used these days. We employ a HEPA vacuum
for such cleanup work. <br>
<br>
Fortunately, UC Berkeley is situated in an area that has several
semiconductor parts cleaning services and we use such services.
Previously we employed 200 mm borosilicate glass chimneys which were
either disposable or cleanable in an acid such as aqua-regia. In the
case of a metal chambers we'd use a grinder with a metal brush.<br>
<br>
Our PVD systems incorporate "venetian-blind" view ports, i.e.
windows that use a series of overlapping glass slides to intercept
evaporants from the viewport window. The slides are cheap; we throw
them away as needed.<br>
<br>
If you would like some photos, e-mail me.<br>
<br>
Regards,<br>
Bob Hamilton <br>
<br>
<pre class="moz-signature" cols="72">--
Robert Hamilton
University of California at Berkeley
Marvell NanoLab
Equipment Eng. Mgr.
Room 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
<a class="moz-txt-link-abbreviated" href="mailto:bob@eecs.berkeley.edu">bob@eecs.berkeley.edu</a>
Phone: 510-809-8600
Mobile: 510-325-7557
e-mail preferred
</pre>
<br>
<br>
<br>
<div class="moz-cite-prefix">On 2/12/2014 11:34 PM, Onur Serbest
wrote:<br>
</div>
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cite="mid:CAJGQU_gHNY2DbR=EVfSpb4tteY8E7qwKUM_sTPpgypR4GKbxWg@mail.gmail.com"
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<div>Dear all,<br>
<br>
</div>
We are thinking to make Co deposition with e-beam
evaporator. But we have no experience about it.<br>
<br>
</div>
We are afraid of contaminating our chamber. If it
contaminates; how can we clean it. Also is there anything
special we should do before and after deposition.<br>
<br>
</div>
If anyone with Co deposition experience could help us we
would be grateful.<br>
<br>
</div>
Thanks already.<br>
<br>
</div>
Best Regards.<br>
<div>
<div>
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-- <br>
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--- --- --- ---<br>
<br>
Onur SERBEST<br>
Cleanroom Specialist<br>
Process Engineer<br>
<div>Sabanci University Nanotechnology
Research and Application Center,</div>
<div>Orhanli - Tuzla, 34956, Istanbul, Turkey.<br>
</div>
Phone: +90 (216) 483 9993<br>
Fax: +90 (216) 483 9885</div>
</div>
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</blockquote>
<br>
<pre class="moz-signature" cols="72">--
Robert Hamilton
University of California at Berkeley
Marvell NanoLab
Equipment Eng. Mgr.
Room 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
<a class="moz-txt-link-abbreviated" href="mailto:bob@eecs.berkeley.edu">bob@eecs.berkeley.edu</a>
Phone: 510-809-8600
Mobile: 510-325-7557
e-mail preferred
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