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<p class="MsoNormal">We are fortunate to have benches with a quick-dump-rinse cycles where the wafers are vertical and a gentle jets of water are injected onto the wafer while DI water bath is drained and refilled 3 times. The wafers proceed then to a spin-rinse-dryer
before further processing. This process is performed for all wet processes including our developer bench.<o:p></o:p></p>
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<p class="MsoNormal">Cheers!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Julia Aebersold, Ph.D. <o:p></o:p></p>
<p class="MsoNormal">MNTC Cleanroom Manager<o:p></o:p></p>
<p class="MsoNormal">Shumaker Research Building, Room 233<o:p></o:p></p>
<p class="MsoNormal">2210 South Brook Street<o:p></o:p></p>
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
<p class="MsoNormal">Louisville, KY 40292<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">502-852-1572<o:p></o:p></p>
<p class="MsoNormal">http://louisville.edu/micronano/<o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Olona, Leonard E.<br>
<b>Sent:</b> Thursday, February 27, 2014 8:58 AM<br>
<b>To:</b> Errol V. Porter; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Piranha & HF no rinse protocols<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black">Greetings Errol,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black">Here at OU one of our main wet bench uses in the CR is wafer preparation for IV/VI MBE growth. Shiraki Clean is the method of choice. Its really just a fancy RCA clean with solvent metal cleaning
in the beginning of the process. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black">As our other colleagues stated… DI rinse is highly recommended post HF or any other type of acid dip. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black">And to take it a bit further, the way the rinse is performed is very important. One must stride to employ a steady stream of decent research grade DI. A small trickle of low resistivity DI
into a beaker just wont cut it. If you can provide ~18Mohm with a high volume of flow- you will be set! You really need to have the samples placed vertical in the boat or holder. That way the DI rinse can do its thing in a uniform fashion. I've seen
folks submerge the samples horizontally which proved to be a poor way of rinse. Bubbles propagate and get stuck in between the samples/wafers. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black">I have seen a weak flow of say ~2000ml / 4min @10Mohm DI barely cut it when your looking for a nice sheeting action of the sample. After boosting our DI system to provide an actual 17.86Mohm
at gallons of flow per minute we now have excellent results in wafer preparation.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black">A QDR (quick dump rinse) is ideal, but that system requires some serious infrastructure. Simply stated. A good strong rinse with the highest grade (18 Mohm) DI water is the best for results
and safety.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black">I hope this helps! Don’t forget your PPE!<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black">-Len<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Helvetica","sans-serif";color:black">Leonard E. Olona</span></b><span style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="font-size:10.0pt;font-family:"Helvetica","sans-serif";color:black">University Cleanroom Manager</span></i><span style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Helvetica","sans-serif";color:black">University of Oklahoma</span><span style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Helvetica","sans-serif";color:black">110 West Boyd Street Rm 550</span><span style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Helvetica","sans-serif";color:black">Norman, Oklahoma 73019</span><span style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span class="apple-style-span"><span style="color:black">D: +1- 405 325-4374</span></span><span style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;color:black">C: +1- 405 630-9068</span><span style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;color:black">F: +1- 405 325-7066</span><span style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="color:black">From: </span></b><span style="color:black">"Errol V. Porter" <<a href="mailto:evporte@uark.edu">evporte@uark.edu</a>><br>
<b>Date: </b>Wednesday, February 26, 2014 4:43 PM<br>
<b>To: </b>"<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>" <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject: </b>[labnetwork] Piranha & HF no rinse protocols<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Greetings,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">I am trying to get a consensus and feedback from the group on a wet etch process using 1<sup>st</sup> H2SO4:H2O2 (1:1) and 2<sup>nd</sup> HF:H2O (10:1) where the water rinse is omitted. If this is an acceptable
practice in some special circumstances, what safeguards to you put in place to protect the users.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Errol Porter<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">University of Arkansas / HiDEC<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">700 W. Research Center Blvd<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Fayetteville, AR 72701<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Tel. (479) 575-2519<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Mobile: (479) 236-0693<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Fax (479) 575-2719<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">email:</span><span style="color:#1F497D">
<a href="mailto:evporte@uark.edu">evporte@uark.edu</a></span><span style="color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://www.hidec.uark.edu/">http://www.hidec.uark.edu</a></span><span style="color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
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