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<p class="MsoNormal">All<o:p></o:p></p>
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<p class="MsoNormal">We have received a request to evaporate gadolinium. The request presents several handling and safety concerns, including contamination of the process chamber and vacuum pump. The toxic nature of gadolinium seems to be poorly studied,
resulting in some debate. We are uncertain if there is an appropriate approach to successfully and safely allow this material in an e-beam system. Does anyone have any experience, comments, or suggestions?<o:p></o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">tonyO<o:p></o:p></p>
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<p class="MsoNormal">Tony Olsen<o:p></o:p></p>
<p class="MsoNormal">Nanofab Cleanroom Supervisor/Process Engineer<o:p></o:p></p>
<p class="MsoNormal">University of Utah<o:p></o:p></p>
<p class="MsoNormal">36 S Wasatch Dr, Suite 2500 SMBB<o:p></o:p></p>
<p class="MsoNormal">Salt Lake City, UT 84112<o:p></o:p></p>
<p class="MsoNormal">801-587-0651 office<o:p></o:p></p>
<p class="MsoNormal">801-587-3077 fax<o:p></o:p></p>
<p class="MsoNormal"><a href="http://www.nanofab.utah.edu/"><span style="color:#6666CC">www.nanofab.utah.edu</span></a><o:p></o:p></p>
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