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<p class="MsoNormal"><span style="color:#1F497D">Good Morning Tony,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We use a disposable “chimney” inside or e-beam evaporator to contain the Gd.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">More:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Here at CNST we have many users that build test structures for use at NCNR (NIST Center for Neutron Research). Gd is very popular for its neutron absorption qualities. We are incrementally improving our technique
and still need to improve it further. For now we evaporate Gd in our e-beam system. We built a substrate holder that stand on stilts, strategically positioned to avoid the obstacles and rest on the baseplate. The stilts also provide a skeleton that we
wrap with foil. A fresh piece for each deposition. The foil chimney is capped with the substrate holder. We performed timed depositions at first but since this works for us we are adding a crystal monitor inside the chimney. I don’t have any pictures handy
but can get a couple next time we use it.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Gd flakes and particles are very flammable in air (maybe toxic) so we carefully fold up the Gd coated foil and package it for pick up. We worked with our Safety folks and waste removal company for the right
way to package it. I can get you details of that if you like. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Vince<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif","sans-serif";color:#1F497D">Vincent K. Luciani<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif","sans-serif";color:#1F497D">NanoFab Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif","sans-serif";color:#1F497D"><a href="http://www.cnst.nist.gov/">Center for Nanoscale Science and Technology</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif","sans-serif";color:#1F497D">National Institute of Standards and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif","sans-serif";color:#1F497D">100 Bureau Drive, MS 6201<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif","sans-serif";color:#1F497D">Gaithersburg, MD 20899-6200 USA<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif","sans-serif";color:#1F497D">+1-301-975-2886<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Tony L Olsen<br>
<b>Sent:</b> Tuesday, March 04, 2014 7:15 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Evaporation of Gadolinium<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">All<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have received a request to evaporate gadolinium. The request presents several handling and safety concerns, including contamination of the process chamber and vacuum pump. The toxic nature of gadolinium seems to be poorly studied,
resulting in some debate. We are uncertain if there is an appropriate approach to successfully and safely allow this material in an e-beam system. Does anyone have any experience, comments, or suggestions?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">tonyO<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Tony Olsen<o:p></o:p></p>
<p class="MsoNormal">Nanofab Cleanroom Supervisor/Process Engineer<o:p></o:p></p>
<p class="MsoNormal">University of Utah<o:p></o:p></p>
<p class="MsoNormal">36 S Wasatch Dr, Suite 2500 SMBB<o:p></o:p></p>
<p class="MsoNormal">Salt Lake City, UT 84112<o:p></o:p></p>
<p class="MsoNormal">801-587-0651 office<o:p></o:p></p>
<p class="MsoNormal">801-587-3077 fax<o:p></o:p></p>
<p class="MsoNormal"><a href="http://www.nanofab.utah.edu/"><span style="color:#6666CC">www.nanofab.utah.edu</span></a><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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