<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 14 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Wingdings;
panose-1:5 0 0 0 0 0 0 0 0 0;}
@font-face
{font-family:Wingdings;
panose-1:5 0 0 0 0 0 0 0 0 0;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
@font-face
{font-family:"Arial Narrow";
panose-1:2 11 6 6 2 2 2 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoPlainText, li.MsoPlainText, div.MsoPlainText
{mso-style-priority:99;
mso-style-link:"Plain Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
span.PlainTextChar
{mso-style-name:"Plain Text Char";
mso-style-priority:99;
mso-style-link:"Plain Text";
font-family:"Calibri","sans-serif";}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri","sans-serif";}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
/* List Definitions */
@list l0
{mso-list-id:935091519;
mso-list-type:hybrid;
mso-list-template-ids:-251645666 67698689 67698691 67698693 67698689 67698691 67698693 67698689 67698691 67698693;}
@list l0:level1
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Symbol;}
@list l0:level2
{mso-level-number-format:bullet;
mso-level-text:o;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:"Courier New";}
@list l0:level3
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Wingdings;}
@list l0:level4
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Symbol;}
@list l0:level5
{mso-level-number-format:bullet;
mso-level-text:o;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:"Courier New";}
@list l0:level6
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Wingdings;}
@list l0:level7
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Symbol;}
@list l0:level8
{mso-level-number-format:bullet;
mso-level-text:o;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:"Courier New";}
@list l0:level9
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Wingdings;}
ol
{margin-bottom:0in;}
ul
{margin-bottom:0in;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple">
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<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">Hi John,<o:p></o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">Sorry to hear about your HCl issue. As we all know, HCl is very difficult to manage once it escapes. Neutralizing is seldom effective in a clean room environment, and
replacement of metal components that have come in contact with the HCL is the proper way to keep it from spreading. If the proper leak test procedures are in place, one thing that could be causing the leaks is residual moisture that may be present due to
either low quality purge gas or inadequate purging. <o:p></o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoPlainText" style="margin-bottom:6.0pt"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">To solve the problem of how to prevent leaks with HCl and other corrosives these are the questions I would start with.
<o:p></o:p></span></p>
<p class="MsoPlainText" style="margin-left:.5in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">What is the quality of the purge gas?
<o:p></o:p></span></p>
<p class="MsoPlainText" style="margin-left:.5in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">Are you using a purifier on the purge gas?
<o:p></o:p></span></p>
<p class="MsoPlainText" style="margin-left:.5in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">Is H2O or O2 analysis done on the gas system prior to gas introduction?
<o:p></o:p></span></p>
<p class="MsoPlainText" style="margin-left:.5in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">How many purge cycles on gas line prior to gas introduction?
<o:p></o:p></span></p>
<p class="MsoPlainText" style="margin-left:.5in;text-indent:-.25in;mso-list:l0 level1 lfo1">
<![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">How many purge cycles post cylinder change are being done?
<o:p></o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">If you want, I can set up a conference call with Troy Reese, who was the gas systems manager at ON Semi before he came to us, and we can go over these questions. Troy
is very knowledgeable in these situations and we would be happy to help wherever possible. He is also presenting with you at the Bootie Camp coming up at the UGIM conference, so we can talk about it there as well if necessary.<o:p></o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">See you at Harvard.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">Thank you!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Tom Britton</span><span style="font-family:"Times New Roman","serif";color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Director of Sales</span><span style="font-family:"Times New Roman","serif";color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:14.0pt;font-family:"Arial Narrow","sans-serif";color:#244061">Critical Systems, Inc.</span></i><span style="font-size:14.0pt;color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Direct: 208-890-1417<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Office: 877-572-5515<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D"><a href="http://www.criticalsystemsinc.com/"><i><span style="font-family:"Arial Narrow","sans-serif";color:blue">www.CriticalSystemsInc.com</span></i></a></span><i><u><span style="font-size:12.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p></o:p></span></u></i></p>
<p class="MsoNormal"><i><u><span style="font-size:4.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p><span style="text-decoration:none"> </span></o:p></span></u></i></p>
<p class="MsoNormal"><span style="color:#1F497D"><img border="0" width="196" height="38" id="Picture_x0020_1" src="cid:image001.png@01CF8190.8F775570" alt="logo for email signature png"></span><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">-----Original Message-----<br>
From: labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] On Behalf Of John Shott<br>
Sent: Thursday, June 05, 2014 1:09 PM<br>
To: labnetwork@mtl.mit.edu<br>
Subject: [labnetwork] Anhydrous HCl after it escapes ...</p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Labnetwork Community:<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Sooner or later, it seems, anhydrous hydrogen chloride (or a number of equally corrosive materials) is going to escape. At least that is our experience at the Stanford Nanofabrication Facility. Despite our best efforts to use quality
components, do proper leak checking, etc., it seems as if we end up with a leak either in a gas cabinet or in a tool near a mass flow controller. At that point, anything near the site of the original leak has been covered with now moisture-laden hydrogen
chloride ... which, I believe, is far more corrosive than the original anhydrous material.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">For those of you who have encountered similar situations, how do you recover or what to you replace? Do you have effective means of neutralizing those metal surfaces? Do your replace VCR gaskets with thicker-than-normal or grooved
"super gaskets"? Do you replace the entire assembly? Do you leak check, put back in service, and pray?<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Thanks for sharing your experience and insights,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">John<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">_______________________________________________<o:p></o:p></p>
<p class="MsoPlainText">labnetwork mailing list<o:p></o:p></p>
<p class="MsoPlainText"><a href="mailto:labnetwork@mtl.mit.edu"><span style="color:windowtext;text-decoration:none">labnetwork@mtl.mit.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText"><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork"><span style="color:windowtext;text-decoration:none">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><o:p></o:p></p>
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