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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Hi, Dear All,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">I agree with Mary, and Vicky. It is hard to draw a line between process and tool maintenance. Reading the messages from all aspects of cleanroom operation in
the past years, I have learned a lot in this network. The current version works for me.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">BTW, nice to meet lots of you in UGIM. Hope you enjoy the RedSox game and the CNS lab tour (a bit rush in the last minutes, sorry!) . please let us know if
you have any suggestion. We are always learning</span><span style="font-size:11.0pt;font-family:Wingdings;color:#1F497D">J</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Have a nice July 4<sup>th</sup>!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">-JD<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana","sans-serif"">Jiangdong (JD) Deng, Ph.D<br>
Senior Principal Scientist<br>
Manager for Nanofabrication Facility<br>
Center for Nanoscale Systems (CNS)<br>
Harvard University<br>
Tel: 617-495-3396 (office)<br>
website:<a href="http://www.cns.fas.harvard.edu">www.cns.fas.harvard.edu</a><br>
</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Mary Tang<br>
<b>Sent:</b> Thursday, July 03, 2014 1:07 PM<br>
<b>To:</b> Vicky Diadiuk; labnetwork@mtl.mit.edu Network<br>
<b>Subject:</b> Re: [labnetwork] Labnetwork - Process?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Hi all --<br>
<br>
I vote with Vicky. I think it would be hard to separate process, maintenance, and operations. Managing operations, even at a very local tool level, seems to me to require a holistic approach -- if a fabrication process is having a problem, it may be because
of equipment issues or maybe the way the tool is managed or shared. I also learn an awful lot from the discussions because the questions asked are generally things I haven't thought of before -- or maybe something I've always wanted to know, but couldn't
articulate. So I'm also with Vince, I read most every one that comes through. And yes, I've been Duane'd on one or two overly specific postings which I've learned to redirect to specific individuals... The system works.
<br>
<br>
Mary<br>
<br>
<br>
<o:p></o:p></p>
<pre>-- <o:p></o:p></pre>
<pre>Mary X. Tang, Ph.D.<o:p></o:p></pre>
<pre>Stanford Nanofabrication Facility<o:p></o:p></pre>
<pre>Paul G. Allen Bldg 141, Mail Code 4070<o:p></o:p></pre>
<pre>Stanford, CA 94305<o:p></o:p></pre>
<pre>(650)723-9980<o:p></o:p></pre>
<pre><a href="mailto:mtang@stanford.edu">mtang@stanford.edu</a><o:p></o:p></pre>
<pre><a href="https://urldefense.proofpoint.com/v1/url?u=http://snf.stanford.edu&k=AjZjj3dyY74kKL92lieHqQ%3D%3D%0A&r=qnhPky4VT9cU0%2F5BuHOqPbIjiUXKDe4MCKSC9e9Kam4%3D%0A&m=KLLzD%2BOB9Xg%2Fv4oa4NJ6koNzfX2ENuxIhs97fN%2BJ5Do%3D%0A&s=b788ca96e1e0242e41fb4751d67c3f492a8ad0df63006359ee6f5acad29beb5d"><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> http://snf.stanford.edu</a><o:p></o:p></pre>
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<br>
On 7/3/2014 5:11 AM, Vicky Diadiuk wrote:<o:p></o:p></p>
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<p class="MsoNormal">HI, <o:p></o:p></p>
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<p class="MsoNormal"> I respectfully but COMPLETELY disagree.<o:p></o:p></p>
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<p class="MsoNormal">MIT (Prof Duane Boning to be precise) has been moderating Labnetwork for years & it's working beautifully.<o:p></o:p></p>
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<div>
<p class="MsoNormal">The information one gleans (even if one wasn't explicitly interested before it got asked) is most useful, & participants seem to be pretty relaxed asking specific questions.<o:p></o:p></p>
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<p class="MsoNormal">If the thread gets too detailed, it switches seamlessly to a conversation between the parties.<o:p></o:p></p>
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<p class="MsoNormal">I don't think we need to make rather artificial process, equipment & operations distinctions.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">If ain't broke ...<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"> Happy 4th!<o:p></o:p></p>
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<p class="MsoNormal">Vicky<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">On Jul 2, 2014, at 11:30 AM, Bob Henderson wrote:<o:p></o:p></p>
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<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Mac:</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">I think that is a wonderful idea. As I am more involved in various equipment and process technologies, it would be a good opportunity to help with more specific issues regarding
advancements and new equipment available for a variety of nano specific questions and projects. Bob Henderson</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> </span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">From:</span></b><span class="apple-converted-space"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext"> </span></span><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext"><a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a><span class="apple-converted-space"> </span>[<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]<span class="apple-converted-space"> </span><b>On
Behalf Of<span class="apple-converted-space"> </span></b>Mac Hathaway<br>
<b>Sent:</b><span class="apple-converted-space"> </span>Wednesday, July 02, 2014 6:56 AM<br>
<b>To:</b><span class="apple-converted-space"> </span><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b><span class="apple-converted-space"> </span>[labnetwork] Labnetwork - Process?</span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<div>
<p class="MsoNormal">Hey All,<br>
<br>
As there is still occasional uncertainty regarding the main thrust of Labnetwork (i.e. general questions about cleanroom operation and administration vs. more specific questions of more narrow interest), I'm guessing that some Labnetworkers sometimes don't
ask certain question, out of deference to others...<br>
<br>
If this is the case, does it make sense to create a parallel list, for instance "Labnetwork - Process" or "Labnetwork - Equipment", where much more specific questions can be aired without guilt(!), such as "Has anyone seen a difference between 5x9s purity and
98% purity TMA in their ALD aluminum oxide?" Or do folks feel it's fine as it is? I'm thinking a specific process or equipment list might bring in other folks for whom the general questions have not been sufficiently relevant to merit their attention.<span class="apple-converted-space"> </span><br>
<br>
Just a thought that came up during the UGIM...<br>
<br>
<br>
Mac Hathaway<br>
Harvard CNS<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:13.5pt;font-family:"Garamond","serif"">_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<a href="https://urldefense.proofpoint.com/v1/url?u=https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork&k=AjZjj3dyY74kKL92lieHqQ%3D%3D%0A&r=qnhPky4VT9cU0%2F5BuHOqPbIjiUXKDe4MCKSC9e9Kam4%3D%0A&m=KLLzD%2BOB9Xg%2Fv4oa4NJ6koNzfX2ENuxIhs97fN%2BJ5Do%3D%0A&s=9d91d6b3be592504a0b186f7c49d437d22d4ad271f35b17529331a9aad7e7d82"><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></span></p>
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<o:p></o:p></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://urldefense.proofpoint.com/v1/url?u=https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork&k=AjZjj3dyY74kKL92lieHqQ%3D%3D%0A&r=qnhPky4VT9cU0%2F5BuHOqPbIjiUXKDe4MCKSC9e9Kam4%3D%0A&m=KLLzD%2BOB9Xg%2Fv4oa4NJ6koNzfX2ENuxIhs97fN%2BJ5Do%3D%0A&s=9d91d6b3be592504a0b186f7c49d437d22d4ad271f35b17529331a9aad7e7d82"><font color="red"><b>The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be</b></font> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
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