<div dir="ltr"><div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small">Ian:</div><div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small"><br></div><div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small">
You can repair ceramic ESC's with superglue ... but it never lasts. The key to ESC's working is that they "chuck" the wafer sufficiently that the helium does not leak. Typically the ESC is damaged electrically and therefore cannot maintain charge separation and therefore cannot establish the Coulombic chucking force necessary to prevent helium leakage ... leading to poor heat transfer in a vacuum environment.</div>
<div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small"><br></div><div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small">It is highly likely you need to replace the ESC. They are expensive. We are exploring using a supplier CRC to help replace the OEM part from STS. The owners name is Brent Elliot ... great person to work with good honest company. They may be reached by phone at 408-562-4000.</div>
<div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small"><br></div><div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small">Lastly, another primary cause of poor performance is the dc circuit itself. If the circuit is compromised such that it cannot establish the proper voltage on the ESC electrode ... your toast. Also, the DC bias circuit which biases the ESC DC supplies to the plasma potential may be failing ... this will lead to an incorrect chucking voltage relative to the plasma leading to poor charge development and poor helium sealing.</div>
<div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small"><br></div><div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small">There are many manufactures of ESC ... only a few reliable ones ... </div>
<div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small"><br></div><div class="gmail_default" style="font-family:comic sans ms,sans-serif;font-size:small">Good luck ...</div></div><div class="gmail_extra">
<br><br><div class="gmail_quote">On Thu, Jul 10, 2014 at 10:11 AM, Ian Harvey <span dir="ltr"><<a href="mailto:IRHarvey@eng.utah.edu" target="_blank">IRHarvey@eng.utah.edu</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
<div style="word-wrap:break-word">Dear STS owners among Labnetwork Colleagues,<div><br></div><div>We now have our used STS ASPECT DRIE online, and have likely discovered one of the key reasons this unit was originally placed on the used market: the electrostatic chuck indicates localized plasma/heat damage, and we therefore have erratic backside cooling and nonuniform etching.</div>
<div><br></div><div>Any hints from battle-wizened colleagues on where to source parts for STS systems, particularly items such as chucks that STS themselves likely source from others? Best practices for working with STS?</div>
<div><br></div><div>Thank you!</div><div><br></div><div>—Ian</div><div><div><br></div><div>p.s. As suggested by John Shott and Duane Boning (many thanks!) I used and bookmarked the google search:</div><div><br></div><div>
labnetwork STS parts supplier site:<a href="http://www-mtl.mit.edu" target="_blank">www-mtl.mit.edu</a></div><div><br></div><div>...along with a few other search terms. This gave me the confidence that the question had likely not been asked yet...</div>
</div><div>
<span style="border-collapse:separate;color:rgb(0,0,0);font-family:Helvetica;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:-webkit-auto;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;font-size:medium"><span style="border-collapse:separate;color:rgb(0,0,0);font-family:Helvetica;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:-webkit-auto;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;font-size:medium"><span style="border-collapse:separate;color:rgb(0,0,0);font-family:Helvetica;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:-webkit-auto;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;font-size:medium"><div style="word-wrap:break-word">
<span style="border-collapse:separate;color:rgb(0,0,0);font-family:Helvetica;font-style:normal;font-variant:normal;letter-spacing:normal;line-height:normal;text-align:-webkit-auto;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;font-size:medium"><div style="word-wrap:break-word">
<span style="text-indent:0px"><div style="word-wrap:break-word"><span style="text-indent:0px"><div style="word-wrap:break-word"><div style="border-collapse:separate;color:rgb(0,0,0);font-family:Helvetica;font-size:12px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-transform:none;white-space:normal;word-spacing:0px">
<br>********************************************<br>Ian R. Harvey, Ph.D.<br>Associate Director<br>Utah Nanofab <br>Cleanroom Fabrication and Surface Analysis & nano-scale Imaging<br><a href="tel:801%2F585-6162" value="+18015856162" target="_blank">801/585-6162</a> (voicemail)<br>
<a href="http://www.nanofab.utah.edu" target="_blank">www.nanofab.utah.edu</a><br><br></div></div></span></div></span></div></span></div></span></span></span><span></span></div></div><br><div style="word-wrap:break-word">
<div><span></span>
</div>
<br></div><br>_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><br>
<br></blockquote></div><br><br clear="all"><div><br></div>-- <br>Dennis S Grimard, Ph.D<div>Managing Director, Lurie Nanofabrication Facility</div><div><br></div><div>University of Michigan</div><div>1246D EECS Building</div>
<div>1301 Beal Avenue</div><div>Ann Arbor, MI 48109-2122</div><div>(734) 368-7172 (Cell)</div><div>(734) 647-1781 (Fax)</div><div><a href="http://www.lnf.umich.edu" target="_blank">http://www.lnf.umich.edu</a></div>
</div>