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<p class="MsoNormal"><span style="color:#1F497D">Hi Leif,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">When we built our facility in 2012 we had vibration measurements and magnetic field measurements taken in the areas where the Stepper, SEM and AFM were to be located. These were 24 hour surveys. We have a subway
line located 1 block from our facility and a freight train line 50 feet from the building. Both surveys showed when the subway was active, there was magnetic interference and significant vibration. However, we were located on the 3<sup>rd</sup> floor so
that attenuated the magnetic field enough and the vibration was below the specification of the tool manufacturer.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">There are companies that sell electrical/magnetic shield systems we use the following company for those solutions:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Ets-lingren <a href="http://www.ets-lindgren.com">
www.ets-lindgren.com</a> they make an excellent system.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">If you need a good float table this company makes a unit that has active feedback control for vibration damping:<o:p></o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><b><span style="font-size:15.0pt;font-family:"CGOmega\,Bold"">RDM INDUSTRIAL PRODUCTS, INC.<o:p></o:p></span></b></p>
<p class="MsoNormal" style="text-autospace:none"><span style="font-size:12.0pt;font-family:CGOmega">1652 Watson Court<o:p></o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><span style="font-size:12.0pt;font-family:CGOmega">Milpitas, CA 95035-6822<o:p></o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><span style="font-size:12.0pt;font-family:CGOmega">Ph: (408) 945-8400 Fax: (408) 945-8433<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:CGOmega">Website: www.rdm-ind.com</span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Regards <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Principal Member of the Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Group Leader Microfabrication Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cambridge Ma, 02139-3563<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">www.draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">rmorrison@draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">W 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">C 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Leif Johansen<br>
<b>Sent:</b> Tuesday, September 09, 2014 10:20 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Experiences with tram close to cleanroom facility?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear all network members, <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">The City of Copenhagen is currently in the process of scheduling the construction of an electrically driven tram which may run approximately 80 feet (ca. 25 meters) past our cleanroom facility. There will even be a stop right outside on
the road next to us – i.e. many accelerations and decelerations which will emit rather large magnetic fields.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Naturally, we are slightly concerned about maintaining operations – especially of our e-beam writer and SEM equipment. Are any of the lab members facing similar challenges and, if so, how do you tackle them? Is noise cancellation a viable
option with large transient magnetic fields? <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best regards, <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Leif<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Leif S. Johansen
<o:p></o:p></span></b></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#9B9B9B">Head of Operations<o:p></o:p></span></p>
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<td width="400" colspan="2" valign="top" style="width:300.0pt;padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">DTU Danchip
<o:p></o:p></span></p>
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<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Technical University of Denmark<o:p></o:p></span></b></p>
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<td width="50" rowspan="7" valign="top" style="width:37.5pt;padding:6.0pt 0in 0in 0in">
<p class="MsoNormal" align="right" style="text-align:right"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><img border="0" width="36" height="53" id="Picture_x0020_1" src="cid:image001.gif@01CFCC3D.8802CCF0" alt="http://www.dtu.dk/images/DTU_email_logo_01.gif"></span><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Danchip
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Ørsteds Plads, Byg. 347
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">2800 Lyngby
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Direct +45 45255713
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Mobile +45 25348992<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><a href="mailto:lesjo@danchip.dtu.dk">lesjo@danchip.dtu.dk</a>
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><a href="http://www.danchip.dtu.dk/">www.danchip.dtu.dk/</a>
<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="DA"><o:p> </o:p></span></p>
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