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<div class="moz-cite-prefix">Other EMI cancellation system vendors:<br>
-Stefan Mayer Instruments<br>
-Spicer Consulting<br>
<br>
Other vibration cancellation system vendors:<br>
<a class="moz-txt-link-freetext" href="http://www.techmfg.com/products/floorplatforms/quietisland.htm">http://www.techmfg.com/products/floorplatforms/quietisland.htm</a><br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
Office: 163 ISE Lab
Mail to: 250N ISE Lab
Ship to: 165 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784</pre>
On 9/9/2014 2:58 PM, Morrison, Richard H., Jr. wrote:<br>
</div>
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cite="mid:D3862732F46DEB4B93B4A7A80614D28868F45885@mbx2.draper.com"
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<p class="MsoNormal"><span style="color:#1F497D">Hi Leif,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">When we built
our facility in 2012 we had vibration measurements and
magnetic field measurements taken in the areas where the
Stepper, SEM and AFM were to be located. These were 24 hour
surveys. We have a subway line located 1 block from our
facility and a freight train line 50 feet from the building.
Both surveys showed when the subway was active, there was
magnetic interference and significant vibration. However,
we were located on the 3<sup>rd</sup> floor so that
attenuated the magnetic field enough and the vibration was
below the specification of the tool manufacturer.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">There are
companies that sell electrical/magnetic shield systems we
use the following company for those solutions:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Ets-lingren
<a moz-do-not-send="true" href="http://www.ets-lindgren.com">
www.ets-lindgren.com</a> they make an excellent system.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">If you need a
good float table this company makes a unit that has active
feedback control for vibration damping:<o:p></o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><b><span
style="font-size:15.0pt;font-family:"CGOmega\,Bold"">RDM
INDUSTRIAL PRODUCTS, INC.<o:p></o:p></span></b></p>
<p class="MsoNormal" style="text-autospace:none"><span
style="font-size:12.0pt;font-family:CGOmega">1652 Watson
Court<o:p></o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><span
style="font-size:12.0pt;font-family:CGOmega">Milpitas, CA
95035-6822<o:p></o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><span
style="font-size:12.0pt;font-family:CGOmega">Ph: (408)
945-8400 Fax: (408) 945-8433<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:12.0pt;font-family:CGOmega">Website:
<a class="moz-txt-link-abbreviated" href="http://www.rdm-ind.com">www.rdm-ind.com</a></span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Regards <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Draper
Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Principal
Member of the Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Group Leader
Microfabrication Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">555 Technology
Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cambridge Ma,
02139-3563<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a class="moz-txt-link-abbreviated" href="http://www.draper.com">www.draper.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a class="moz-txt-link-abbreviated" href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">W 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">C 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF
1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span
style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span
style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>
[<a class="moz-txt-link-freetext" href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Leif Johansen<br>
<b>Sent:</b> Tuesday, September 09, 2014 10:20 AM<br>
<b>To:</b> <a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Experiences with tram close
to cleanroom facility?<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear all network members, <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">The City of Copenhagen is currently in the
process of scheduling the construction of an electrically
driven tram which may run approximately 80 feet (ca. 25
meters) past our cleanroom facility. There will even be a stop
right outside on the road next to us – i.e. many accelerations
and decelerations which will emit rather large magnetic
fields.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Naturally, we are slightly concerned about
maintaining operations – especially of our e-beam writer and
SEM equipment. Are any of the lab members facing similar
challenges and, if so, how do you tackle them? Is noise
cancellation a viable option with large transient magnetic
fields? <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best regards, <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Leif<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<table class="MsoNormalTable"
style="width:300.0pt;border-collapse:collapse" cellpadding="0"
cellspacing="0" border="0" width="400">
<tbody>
<tr>
<td colspan="2" style="width:300.0pt;padding:0in 0in 0in
0in" valign="top" width="400">
<p class="MsoNormal"><b><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Leif
S. Johansen
<o:p></o:p></span></b></p>
</td>
</tr>
<tr>
<td colspan="2" style="width:300.0pt;padding:0in 0in 0in
0in" valign="top" width="400">
<p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#9B9B9B">Head
of Operations<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td colspan="2" style="width:300.0pt;padding:0in 0in 0in
0in" valign="top" width="400">
<p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">DTU
Danchip
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td colspan="2"
style="width:300.0pt;border:none;border-bottom:solid
#AEAEAE 1.0pt;padding:0in 0in 0in 0in" valign="top"
width="400">
<p class="MsoNormal" style="mso-line-height-alt:0pt"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="width:262.5pt;padding:6.0pt 0in 0in 0in"
valign="top" width="350">
<p class="MsoNormal"><b><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Technical
University of Denmark<o:p></o:p></span></b></p>
</td>
<td rowspan="7" style="width:37.5pt;padding:6.0pt 0in 0in
0in" valign="top" width="50">
<p class="MsoNormal" style="text-align:right"
align="right"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><img
id="Picture_x0020_1"
src="cid:part2.08030503.03060307@udel.edu"
alt="http://www.dtu.dk/images/DTU_email_logo_01.gif"
border="0" height="53" width="36"></span><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Danchip
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Ørsteds
Plads, Byg. 347
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">2800
Lyngby
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Direct
+45 45255713
<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Mobile
+45 25348992<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><a
moz-do-not-send="true"
href="mailto:lesjo@danchip.dtu.dk">lesjo@danchip.dtu.dk</a>
<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td style="padding:0in 0in 0in 0in">
<p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><a
moz-do-not-send="true"
href="http://www.danchip.dtu.dk/">www.danchip.dtu.dk/</a>
<o:p></o:p></span></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"><span lang="DA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="DA"><o:p> </o:p></span></p>
</div>
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<pre wrap="">_______________________________________________
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