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    <div class="moz-cite-prefix">Other EMI cancellation system vendors:<br>
      -Stefan Mayer Instruments<br>
      -Spicer Consulting<br>
      <br>
      Other vibration cancellation system vendors:<br>
      <a class="moz-txt-link-freetext" href="http://www.techmfg.com/products/floorplatforms/quietisland.htm">http://www.techmfg.com/products/floorplatforms/quietisland.htm</a><br>
      <pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
Office: 163 ISE Lab
Mail to: 250N ISE Lab
Ship to: 165 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784</pre>
      On 9/9/2014 2:58 PM, Morrison, Richard H., Jr. wrote:<br>
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    <blockquote
      cite="mid:D3862732F46DEB4B93B4A7A80614D28868F45885@mbx2.draper.com"
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        <p class="MsoNormal"><span style="color:#1F497D">Hi Leif,<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">When we built
            our facility in 2012 we had vibration measurements and
            magnetic field measurements taken in the areas where the
            Stepper, SEM and AFM were to be located. These were 24 hour
            surveys. We have a subway line located 1 block from our
            facility and a freight train line 50 feet from the building.
             Both surveys showed when the subway was active, there was
            magnetic interference and significant vibration.  However,
             we were located on the 3<sup>rd</sup> floor so that
            attenuated the magnetic field enough and the vibration was
            below the specification of the tool manufacturer.<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">There are
            companies that sell electrical/magnetic shield systems we
            use the following company for those solutions:<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">Ets-lingren   
            <a moz-do-not-send="true" href="http://www.ets-lindgren.com">
              www.ets-lindgren.com</a>    they make an excellent system.<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">If you need a
            good float table this company makes a unit that has active
            feedback control for vibration damping:<o:p></o:p></span></p>
        <p class="MsoNormal" style="text-autospace:none"><b><span
              style="font-size:15.0pt;font-family:"CGOmega\,Bold"">RDM
              INDUSTRIAL PRODUCTS, INC.<o:p></o:p></span></b></p>
        <p class="MsoNormal" style="text-autospace:none"><span
            style="font-size:12.0pt;font-family:CGOmega">1652 Watson
            Court<o:p></o:p></span></p>
        <p class="MsoNormal" style="text-autospace:none"><span
            style="font-size:12.0pt;font-family:CGOmega">Milpitas, CA
            95035-6822<o:p></o:p></span></p>
        <p class="MsoNormal" style="text-autospace:none"><span
            style="font-size:12.0pt;font-family:CGOmega">Ph: (408)
            945-8400 Fax: (408) 945-8433<o:p></o:p></span></p>
        <p class="MsoNormal"><span
            style="font-size:12.0pt;font-family:CGOmega">Website:
            <a class="moz-txt-link-abbreviated" href="http://www.rdm-ind.com">www.rdm-ind.com</a></span><span style="color:#1F497D"><o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">Regards <o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">Draper
            Laboratory<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">Principal 
            Member of the Technical Staff<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">Group Leader
            Microfabrication Operations<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">555 Technology
            Square<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">Cambridge Ma,
            02139-3563<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><a class="moz-txt-link-abbreviated" href="http://www.draper.com">www.draper.com</a><o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><a class="moz-txt-link-abbreviated" href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">W 617-258-3420<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D">C 508-930-3461<o:p></o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
        <div>
          <div style="border:none;border-top:solid #B5C4DF
            1.0pt;padding:3.0pt 0in 0in 0in">
            <p class="MsoNormal"><b><span
style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span
style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">
                <a class="moz-txt-link-abbreviated" href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>
                [<a class="moz-txt-link-freetext" href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
                <b>On Behalf Of </b>Leif Johansen<br>
                <b>Sent:</b> Tuesday, September 09, 2014 10:20 AM<br>
                <b>To:</b> <a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
                <b>Subject:</b> [labnetwork] Experiences with tram close
                to cleanroom facility?<o:p></o:p></span></p>
          </div>
        </div>
        <p class="MsoNormal"><o:p> </o:p></p>
        <p class="MsoNormal">Dear all network members, <o:p></o:p></p>
        <p class="MsoNormal"><o:p> </o:p></p>
        <p class="MsoNormal">The City of Copenhagen is currently in the
          process of scheduling the construction of an electrically
          driven tram which may run approximately 80 feet (ca. 25
          meters) past our cleanroom facility. There will even be a stop
          right outside on the road next to us – i.e. many accelerations
          and decelerations which will emit rather large magnetic
          fields.
          <o:p></o:p></p>
        <p class="MsoNormal"><o:p> </o:p></p>
        <p class="MsoNormal">Naturally, we are slightly concerned about
          maintaining operations – especially of our e-beam writer and
          SEM equipment. Are any of the lab members facing similar
          challenges and, if so, how do you tackle them? Is noise
          cancellation a viable option with large transient magnetic
          fields? <o:p></o:p></p>
        <p class="MsoNormal"><o:p> </o:p></p>
        <p class="MsoNormal">Best regards, <o:p></o:p></p>
        <p class="MsoNormal"><o:p> </o:p></p>
        <p class="MsoNormal">Leif<o:p></o:p></p>
        <p class="MsoNormal"><o:p> </o:p></p>
        <table class="MsoNormalTable"
          style="width:300.0pt;border-collapse:collapse" cellpadding="0"
          cellspacing="0" border="0" width="400">
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            <tr>
              <td colspan="2" style="width:300.0pt;padding:0in 0in 0in
                0in" valign="top" width="400">
                <p class="MsoNormal"><b><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Leif
                      S. Johansen
                      <o:p></o:p></span></b></p>
              </td>
            </tr>
            <tr>
              <td colspan="2" style="width:300.0pt;padding:0in 0in 0in
                0in" valign="top" width="400">
                <p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:#9B9B9B">Head
                    of Operations<o:p></o:p></span></p>
              </td>
            </tr>
            <tr>
              <td colspan="2" style="width:300.0pt;padding:0in 0in 0in
                0in" valign="top" width="400">
                <p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">DTU
                    Danchip
                    <o:p></o:p></span></p>
              </td>
            </tr>
            <tr>
              <td colspan="2"
                style="width:300.0pt;border:none;border-bottom:solid
                #AEAEAE 1.0pt;padding:0in 0in 0in 0in" valign="top"
                width="400">
                <p class="MsoNormal" style="mso-line-height-alt:0pt"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"> 
                    <o:p></o:p></span></p>
              </td>
            </tr>
            <tr>
              <td style="width:262.5pt;padding:6.0pt 0in 0in 0in"
                valign="top" width="350">
                <p class="MsoNormal"><b><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Technical
                      University of Denmark<o:p></o:p></span></b></p>
              </td>
              <td rowspan="7" style="width:37.5pt;padding:6.0pt 0in 0in
                0in" valign="top" width="50">
                <p class="MsoNormal" style="text-align:right"
                  align="right"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><img
                      id="Picture_x0020_1"
                      src="cid:part2.08030503.03060307@udel.edu"
                      alt="http://www.dtu.dk/images/DTU_email_logo_01.gif"
                      border="0" height="53" width="36"></span><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><o:p></o:p></span></p>
              </td>
            </tr>
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              <td style="padding:0in 0in 0in 0in">
                <p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Danchip
                    <o:p></o:p></span></p>
              </td>
            </tr>
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              <td style="padding:0in 0in 0in 0in">
                <p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Ørsteds
                    Plads, Byg. 347
                    <o:p></o:p></span></p>
              </td>
            </tr>
            <tr>
              <td style="padding:0in 0in 0in 0in">
                <p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">2800 
                    Lyngby
                    <o:p></o:p></span></p>
              </td>
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              <td style="padding:0in 0in 0in 0in">
                <p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Direct
                    +45 45255713
                    <o:p></o:p></span></p>
                <p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black">Mobile
                    +45 25348992<o:p></o:p></span></p>
              </td>
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                <p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><a
                      moz-do-not-send="true"
                      href="mailto:lesjo@danchip.dtu.dk">lesjo@danchip.dtu.dk</a>
                    <o:p></o:p></span></p>
              </td>
            </tr>
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              <td style="padding:0in 0in 0in 0in">
                <p class="MsoNormal"><span
style="font-size:8.0pt;font-family:"Arial","sans-serif";color:black"><a
                      moz-do-not-send="true"
                      href="http://www.danchip.dtu.dk/">www.danchip.dtu.dk/</a>
                    <o:p></o:p></span></p>
              </td>
            </tr>
          </tbody>
        </table>
        <p class="MsoNormal"><span lang="DA"><o:p> </o:p></span></p>
        <p class="MsoNormal"><span lang="DA"><o:p> </o:p></span></p>
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      <pre wrap="">_______________________________________________
labnetwork mailing list
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
<a class="moz-txt-link-freetext" href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a>
</pre>
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