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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Kamal,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"> My concern is of the black material. Copper oxide is usually greenish and I don’t think it would form if you were not doing reactive sputtering with O2.
Sputtering targets, particularly gold ones, are bonded to the copper with indium which is grey-black. Indium is used for its low temperature melting point and high thermal conductivity. I would send a sample of the material (on a wipe) for analysis before
planning a cleaning strategy.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Equipment Dood<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Harvard University Center for Nanoscale systems.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Kamal Yadav<br>
<b>Sent:</b> Thursday, September 18, 2014 2:12 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Cleaning of SS chambers with Acetic Acid<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Dear All,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Recently our gold metal target got completely consumed during the run in the sputter and the metal underneath, which is copper, got sputtered instead. It may have happened few times, as target is fixed and hard to reach usually for a look
before sputtering.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">This made the entire chamber looks black, and dirty. I believe copper oxide coating must be there. After this the metal resistivities are coming in ohm-cm, as we believe some redeposition may be happening.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I want to clean the chamber using diluted acetic acid [4% only] which removes copper oxides. Any other recommendation to clean SS chambers and hope this may be ok?. Or any other suggestion to the observation.<br clear="all">
<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Thanks a lot!<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">-- <o:p></o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
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<p class="MsoNormal">Kamal Yadav<o:p></o:p></p>
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<p class="MsoNormal">Sr. Process Technologist<o:p></o:p></p>
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<p class="MsoNormal">IITBNF, EE Department, Annexe,<o:p></o:p></p>
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<p class="MsoNormal">IIT Bombay, Powai<o:p></o:p></p>
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<p class="MsoNormal">Mumbai 400076<o:p></o:p></p>
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<p class="MsoNormal">Internal: 4435<o:p></o:p></p>
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<p class="MsoNormal">Cell: +91-7506144798<o:p></o:p></p>
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<p class="MsoNormal">Email: <a href="mailto:kamal.yadav@gmail.com" target="_blank">
kamal.yadav@gmail.com</a>, <a href="mailto:kamalyadav@ee.iitb.ac.in" target="_blank">
kamalyadav@ee.iitb.ac.in</a><o:p></o:p></p>
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