<div dir="ltr">Dear All,<div><br></div><div>Recently our gold metal target got completely consumed during the run in the sputter and the metal underneath, which is copper, got sputtered instead. It may have happened few times, as target is fixed and hard to reach usually for a look before sputtering.</div><div><br></div><div>This made the entire chamber looks black, and dirty. I believe copper oxide coating must be there. After this the metal resistivities are coming in ohm-cm, as we believe some redeposition may be happening.</div><div><br></div><div>I want to clean the chamber using diluted acetic acid [4% only] which removes copper oxides. Any other recommendation to clean SS chambers and hope this may be ok?. Or any other suggestion to the observation.<br clear="all"><div><br></div><div>Thanks a lot!</div><div><br></div>-- <br><div dir="ltr"><div>Thanks,<br></div><div>Kamal Yadav</div><div>Sr. Process Technologist<br></div><div>IITBNF, EE Department, Annexe,</div><div>IIT Bombay, Powai</div><div>Mumbai 400076</div><div>Internal: 4435</div><div>Cell: +91-7506144798</div><div>Email: <a href="mailto:kamal.yadav@gmail.com" target="_blank">kamal.yadav@gmail.com</a>, <a href="mailto:kamalyadav@ee.iitb.ac.in" target="_blank">kamalyadav@ee.iitb.ac.in</a></div></div>
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