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<p class="MsoNormal"><span style="color:#1F497D">HI,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">WE have what is called a “dirty” evaporator for MgF, In, Sn materials like that. We just lined the inside of the chamber with foil and after completion we carefully removed the foil and sent it to waste. Safety
wanted us to wear proper PPE and we had no issue. We stored the material in a dry box in a sealed container.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Hope this helps.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Principal Member of the Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Group Leader Microfabrication Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cambridge Ma, 02139-3563<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">www.draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">rmorrison@draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">W 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">C 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Mark Walters, Ph.D.<br>
<b>Sent:</b> Monday, September 22, 2014 9:22 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] MgF2 deposition considerations<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have several people here who would like for our facility to offer a MgF2 deposition process (either evaporation or sputtering or both). While MgF2 seems to be a fairly common optical coating material, I’m having difficulty finding information
about potential health and cross-contamination issues with this material in deposition systems. I’ve heard everything from it’s a very stable material and you don’t need to worry about it, to you should wear Hazmat gear anytime you change out the sources.
I’m hoping that there are people in this community that have experience with running MgF2 deposition processes in their facilities. If so, could you share any precautions or special procedures you implement to avoid or limit possible health concerns from
fluoride exposure and cross-contamination with other materials and processes run in the same systems?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">Mark D. Walters, Ph.D.<o:p></o:p></p>
<p class="MsoNormal">Director, Shared Materials Instrumentation Facility (SMIF)<o:p></o:p></p>
<p class="MsoNormal">Duke University<o:p></o:p></p>
<p class="MsoNormal">Box 90271<o:p></o:p></p>
<p class="MsoNormal">Durham, NC 27708-0271<o:p></o:p></p>
<p class="MsoNormal"><a href="blocked::http://smif.lab.duke.edu/" title="blocked::http://smif.lab.duke.edu/"><span style="color:blue">http://smif.lab.duke.edu</span></a><o:p></o:p></p>
<p class="MsoNormal">Phone: (919) 660-5486<o:p></o:p></p>
<p class="MsoNormal">Fax: (919) 660-5491<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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