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<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">Hello Iulian,<o:p></o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">John Shott was spot on with his assessment. Proper procedures keep both particles out of the cleanroom and your technicians safe. I sent this email to Todd Erickson,
who is the product manager of our Gas Abatement Products division. I think you met him at the UGIM conference this past June.
<o:p></o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">He responded as follows:<o:p></o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">"Most of the applications we see for the Guardian type burn boxes are installed in the chase or sub-fab area of the cleanroom. While the burn box is running there is
no particle adders to the cleanroom because the tool is exhausted and the particles are enclosed in the burn box with some drag-out into the duct work. Cleaning the system while doing the PM is another situation that can be handled by proper procedures. Capping
any parts immediately after removal helps immensely but also using a vacuum with a HEPA filter would be beneficial. Iulian, as with any process, it is imperative that the application be specified and matched with a certain type and size of POU scrubber. If
a burn box is specified it must see only flammable gases like CO, H2, SiH4 and Hydrogencarbons."</span></i><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p></o:p></span></p>
<p class="MsoPlainText"><span style="font-family:"Arial Narrow","sans-serif""><o:p> </o:p></span></p>
<p class="MsoPlainText"><span style="color:#1F497D">CSI supplies and services several different types of burn boxes, so we are well versed in how to effectively run and maintain these. If you have any questions, we have our Abatement Division sales manager
(Gene Ungvarsky, formerly with CS Clean) in Boston that I can put you in touch with, or you can post them here and we'll answer them accordingly.<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">Thank you!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D">Tom<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Tom Britton</span><span style="font-family:"Times New Roman","serif";color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Director of Sales</span><span style="font-family:"Times New Roman","serif";color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:14.0pt;font-family:"Arial Narrow","sans-serif";color:#244061">Critical Systems, Inc.</span></i><span style="font-size:14.0pt;color:#244061"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Direct: 208-890-1417<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial Narrow","sans-serif";color:#244061">Office: 877-572-5515<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:#1F497D"><a href="http://www.criticalsystemsinc.com/"><i><span style="font-family:"Arial Narrow","sans-serif";color:blue">www.CriticalSystemsInc.com</span></i></a></span><i><u><span style="font-size:12.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p></o:p></span></u></i></p>
<p class="MsoNormal"><i><u><span style="font-size:4.0pt;font-family:"Arial Narrow","sans-serif";color:#1F497D"><o:p><span style="text-decoration:none"> </span></o:p></span></u></i></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoPlainText"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoPlainText"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoPlainText">-----Original Message-----<br>
From: labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] On Behalf Of Iulian Codreanu<br>
Sent: Monday, September 29, 2014 3:32 PM<br>
To: Fab Network<br>
Subject: [labnetwork] burn box location</p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Dear Colleagues,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">I am looking at the possibility of using a burn box (using natural gas for fuel) to abate the exhaust from some CVD tools. I would have to locate it in the chase area. It appears that a burn box is not that clean; I can imagine "soot"
spreading throughout the cleanroom during maintenance. Does anyone have burn boxes in the chase area? How do you keep the soot contained?<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Thank you very much.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Iulian<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">--<o:p></o:p></p>
<p class="MsoPlainText">iulian Codreanu, Ph.D.<o:p></o:p></p>
<p class="MsoPlainText">Director of Operations, UD NanoFab<o:p></o:p></p>
<p class="MsoPlainText">University of Delaware<o:p></o:p></p>
<p class="MsoPlainText">Office: 163 ISE Lab<o:p></o:p></p>
<p class="MsoPlainText">Mail to: 250N ISE Lab<o:p></o:p></p>
<p class="MsoPlainText">Ship to: 165 ISE Lab<o:p></o:p></p>
<p class="MsoPlainText">221 Academy Street<o:p></o:p></p>
<p class="MsoPlainText">Newark, DE 19716<o:p></o:p></p>
<p class="MsoPlainText">302-831-2784<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">_______________________________________________<o:p></o:p></p>
<p class="MsoPlainText">labnetwork mailing list<o:p></o:p></p>
<p class="MsoPlainText"><a href="mailto:labnetwork@mtl.mit.edu"><span style="color:windowtext;text-decoration:none">labnetwork@mtl.mit.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText"><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork"><span style="color:windowtext;text-decoration:none">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><o:p></o:p></p>
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