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<div class="moz-cite-prefix">Milan,<br>
I would not be concerned with the copper pipes.<br>
I would use that N2 as a vent gas and more.<br>
Others will consider this blasphemy.<br>
I would install an in line H2O / O2 monitor<br>
and add point of use filters at critical tools.<br>
<br>
Our LN is delivered via Cu pipe to SS vaporizer<br>
then via SS piping to lab. We do not have a separate<br>
house N2 and process N2. We add small<br>
point of use purifiers (usually SAES) at those tools with <br>
critical process requirements. E.g. reactive sputtering of
nitrides.<br>
We monitor O2 content real time. Range is 0.6 - 0.9 ppm <br>
<br>
Bill Flounders<br>
UC Berkeley<br>
<br>
Milan Begliarbekov wrote:<br>
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<div style="direction: ltr;font-family: Tahoma;color:
#000000;font-size: 10pt;">Hi All,
<div><br>
</div>
<div>At the moment we're trying to decide the purity / source of
the nitrogen we will use to vent our tools. The building has a
bulk nitrogen system that is plumbed to the clean room in
copper pipes. Our clean room contractor believes that that
nitrogen might be too dirty to use as a vent gas and
recommends ultra pure nitrogen. I am wondering if anyone has
thoughts on this matter. I believe that it is possible to get
99.998 % N2 out of copper pipes. Is that the case? If not are
there purifiers / dryers that are commonly used? This is only
a vent gas and not a process gas. </div>
<div><br>
</div>
<div>Any wisdom in this matter will be highly appreciated.</div>
<div><br>
</div>
<div>Best,</div>
<div><br>
</div>
<div>milan</div>
<div>Technical Cleanroom Manager</div>
<div>CUNY Advanced Science Research Center</div>
<div><a class="moz-txt-link-abbreviated" href="mailto:Milan.Begliarbekov@asrc.cuny.edu">Milan.Begliarbekov@asrc.cuny.edu</a></div>
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