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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Milan,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">I think 99.998% N2 is good enough to vent the tools. After a tool (mostly chamber) is vented by N2, we usually open it. And the tool (chamber) will be exposed
to ambient air. So the purity of N2 is not a big deal.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Yaguang Lian<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal" style="line-height:115%"><span style="font-size:10.0pt;line-height:115%;font-family:"Arial","sans-serif";color:#1F497D">Research Engineer<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:115%"><span style="font-size:10.0pt;line-height:115%;font-family:"Arial","sans-serif";color:#1F497D">2306 Micro and Nanotechnology Laboratory<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:115%"><span style="font-size:10.0pt;line-height:115%;font-family:"Arial","sans-serif";color:#1F497D">University of Illinois at Urbana-Champaign<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:115%"><span style="font-size:10.0pt;line-height:115%;font-family:"Arial","sans-serif";color:#1F497D">208 N. Wright St.<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:115%"><span style="font-size:10.0pt;line-height:115%;font-family:"Arial","sans-serif";color:#1F497D">Urbana, IL 61801<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:115%"><span style="font-size:10.0pt;line-height:115%;font-family:"Arial","sans-serif";color:#1F497D">Phone: 217-333-8051<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:115%"><span style="font-size:10.0pt;line-height:115%;font-family:"Arial","sans-serif";color:#1F497D">Email: yglian@illinois.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Milan Begliarbekov<br>
<b>Sent:</b> 2014</span><span lang="ZH-CN" style="font-size:10.0pt;font-family:SimSun">年</span><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">10</span><span lang="ZH-CN" style="font-size:10.0pt;font-family:SimSun">月</span><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">31</span><span lang="ZH-CN" style="font-size:10.0pt;font-family:SimSun">日</span><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">
11:15<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Venting Tools with Building Nitrogen<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Hi All,
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">At the moment we're trying to decide the purity / source of the nitrogen we will use to vent our tools. The building has a bulk nitrogen system that is plumbed
to the clean room in copper pipes. Our clean room contractor believes that that nitrogen might be too dirty to use as a vent gas and recommends ultra pure nitrogen. I am wondering if anyone has thoughts on this matter. I believe that it is possible to get
99.998 % N2 out of copper pipes. Is that the case? If not are there purifiers / dryers that are commonly used? This is only a vent gas and not a process gas. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Any wisdom in this matter will be highly appreciated.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Best,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">milan<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">Technical Cleanroom Manager<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black">CUNY Advanced Science Research Center<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:black"><a href="mailto:Milan.Begliarbekov@asrc.cuny.edu">Milan.Begliarbekov@asrc.cuny.edu</a><o:p></o:p></span></p>
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