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/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:"Microsoft Sans Serif";
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:"Trebuchet MS";
panose-1:2 11 6 3 2 2 2 2 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
span.EmailStyle17
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">I’m so glad this past experience has finally been called upon, it justifies the time I spent on it years ago. I have made many many masks from transparencies
and have found that inkjets set for transparencies with saturation and ink volume set to high make very nice masks with no pinholes. Just give them an extra minute to dry before you touch them.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Inkjets work better than laser printers for two reasons. Laser print, even though it looks nice to the eye is filled with very small pinholes which contact lithography
will reproduce. Inkjet ink flows to make a solidly opaque feature.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Another key difference is that, if you look at a laser jet transparency film. It is foggy. It takes way too much overexposing for this not to leave tiny resist
dots (assuming pos. resist). Whereas if you look at an inkjet transparency film, it is clear as glass.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Draw a circle around the pattern slightly larger than the wafer or piece so you can line up the mask, cut the transparency down to the size of a clear mask plate,
tape it on and expose with the transparency in direct contact. Reverse the image before you print the transparency and you can put the ink in direct contact for maximum resolution. Have fun and good luck!<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Vince<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Microsoft Sans Serif",sans-serif;color:#1F497D">Vincent K. Luciani<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Microsoft Sans Serif",sans-serif;color:#1F497D">NanoFab Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Microsoft Sans Serif",sans-serif;color:#1F497D"><a href="http://www.cnst.nist.gov/">Center for Nanoscale Science and Technology</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Microsoft Sans Serif",sans-serif;color:#1F497D">National Institute of Standards and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Microsoft Sans Serif",sans-serif;color:#1F497D">100 Bureau Drive, MS 6201<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Microsoft Sans Serif",sans-serif;color:#1F497D">Gaithersburg, MD 20899-6200 USA<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Microsoft Sans Serif",sans-serif;color:#1F497D">+1-301-975-2886<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Jacob Trevino<br>
<b>Sent:</b> Wednesday, January 07, 2015 1:51 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Printer for Photolithography Masks<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri",sans-serif;color:black">Happy New Year All,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri",sans-serif;color:black">Does anyone have any recommendations for specs on a printer to be used for quick and easy (lower resolution) photolithography masks. These would be printed on transparencies
to be used with a blank glass plates and standard contact lithography. Laser jet verses ink jet? Resolution in both techniques these days seems impressively high and sufficient, but maybe there are advantages to one vs the other. Any input would be greatly
appreciated. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri",sans-serif;color:black">Best regards,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.5pt;font-family:"Calibri",sans-serif;color:black">Jacob<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:13.5pt;font-family:"Calibri",sans-serif;color:black">-------------------------------- <o:p></o:p></span></p>
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<p class="MsoNormal"><b><i><span style="font-family:"Calibri",sans-serif;color:black">Jacob Trevino, PhD</span></i></b><span style="font-family:"Calibri",sans-serif;color:black"><br>
NanoFabrication Facility Director<br>
The City University of New York (CUNY)<br>
Advanced Science Research Center (ASRC)<br>
Tel. (646) 664-9468</span><span style="color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Cel. (646) 629-1179</span><span style="color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Email: <a href="mailto:Jacob.Trevino@asrc.cuny.edu">Jacob.Trevino@asrc.cuny.edu</a></span><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:13.5pt;font-family:"Calibri",sans-serif;color:black">Web: </span><span style="font-size:11.5pt;font-family:"Calibri",sans-serif;color:black"><a href="http://asrc.cuny.edu/"><span style="font-size:13.5pt">http://asrc.cuny.edu/</span></a> <o:p></o:p></span></p>
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