<html><head><meta http-equiv="Content-Type" content="text/html charset=windows-1252"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;"><div>Hello</div><div><br></div><div><br></div><div>Thanks to all for your input about the expired gas. The general consensus is that expiration dates are not relevant for process stability so I’ll continue using what I have. </div><div><br></div><div>regards</div><div>phil</div><div><br></div><div><br></div><div><br></div><div><br><div apple-content-edited="true">
<div style="color: rgb(0, 0, 0); letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;"><div><div>Dr. Phillip Himmer</div><div>Manager Montana Microfabrication Facility</div><div>Montana State University</div><div>Bozeman Mt 59717</div><div><br></div><div>Office Ph: 406-994-7178</div><div>email:<span class="Apple-tab-span" style="white-space: pre;"> </span><a href="mailto:philh@ece.montana.edu">philh@ece.montana.edu</a></div></div></div><br class="Apple-interchange-newline"><br class="Apple-interchange-newline">
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<br><div><div>On Jan 7, 2015, at 2:44 PM, Janney, Peter J. <<a href="mailto:janney.9@osu.edu">janney.9@osu.edu</a>> wrote:</div><br class="Apple-interchange-newline"><blockquote type="cite">
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<div>It's my understanding that the gas doesn't really expire, it's only the certification on the tank. </div>
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<div>Pete Janney</div>
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<div>-------- Original message --------</div>
<div>From: "Himmer, Phil" </div>
<div>Date:01/07/2015 2:14 PM (GMT-05:00) </div>
<div>To: <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a> </div>
<div>Subject: [labnetwork] expired process gas </div>
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<div>Hello,
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<div>Does anyone have any practical experience using Chlorine and Hydrogen Bromide gas past it’s expiration date? We use the gas for ICP etching of chrome and aluminum.</div>
<div>We have small cylinders(air liquide 7-size) of each that still have gas in them but are now years past the expiration date. I have pulled them from the gas cabinet with the plan to replace them but am having difficulty finding a vendor who offers these
gasses in these small volumes. We are trying to not use lecture bottles due to disposal considerations.</div>
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<div>looking forward to suggestions</div>
<div>phil</div>
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<div>Dr. Phillip Himmer</div>
<div>Manager Montana Microfabrication Facility</div>
<div>Montana State University</div>
<div>Bozeman Mt 59717</div>
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<div>Office Ph: 406-994-7178</div>
<div>email:<span class="Apple-tab-span" style="white-space:pre"> </span><a href="mailto:philh@ece.montana.edu">philh@ece.montana.edu</a></div>
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