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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Just to add a little anecdotal information into the mix, we had an interesting experience (interesting but not surprising) on moving a laser system from the
old building - with old, not so careful plumbing – to the BNC. We found that the laser gases lasted an order of magnitude longer with the new plumbing. The new system had very low moisture and oxygen intrusion, which supports Bob’s comment about the interaction
with the steel cylinder walls. As we all have experienced, those interactions are exacerbated by the presence of moisture (and to a lesser extent oxygen). We therefore believe that the reason that the gas had a dramatically longer lifetime is that it maintained
its purity longer. This, then, calls into question the lifetime generalities given by the gas suppliers.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">John<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><i><span style="font-size:9.0pt;font-family:"Cambria","serif";color:#1F497D">John R. Weaver<o:p></o:p></span></i></b></p>
<p class="MsoNormal"><b><i><span style="font-size:9.0pt;font-family:"Cambria","serif";color:#1F497D">Strategic Facilities Officer<o:p></o:p></span></i></b></p>
<p class="MsoNormal"><b><i><span style="font-size:9.0pt;font-family:"Cambria","serif";color:#1F497D">Birck Nanotechnology Center<o:p></o:p></span></i></b></p>
<p class="MsoNormal"><b><i><span style="font-size:9.0pt;font-family:"Cambria","serif";color:#1F497D">1205 West State Street<o:p></o:p></span></i></b></p>
<p class="MsoNormal"><b><i><span style="font-size:9.0pt;font-family:"Cambria","serif";color:#1F497D">West Lafayette IN 47907<o:p></o:p></span></i></b></p>
<p class="MsoNormal"><b><i><span style="font-size:9.0pt;font-family:"Cambria","serif";color:#1F497D">(765) 494-5494<o:p></o:p></span></i></b></p>
<p class="MsoNormal"><b><i><span style="font-size:9.0pt;font-family:"Cambria","serif";color:#1F497D"><a href="mailto:jrweaver@purdue.edu"><span style="color:blue">jrweaver@purdue.edu</span></a><o:p></o:p></span></i></b></p>
<p class="MsoNormal"><b><i><span style="font-size:9.0pt;font-family:"Cambria","serif";color:#1F497D">nano.purdue.edu<o:p></o:p></span></i></b></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="margin-left:.5in"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext"> labnetwork-bounces@mtl.mit.edu
[mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Bob Hamilton<br>
<b>Sent:</b> Monday, January 12, 2015 10:53 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] expired process gas<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
<p class="MsoNormal" style="margin-left:.5in">Colleagues,<br>
<br>
Following up on Kamal's 1/9 post, in the case of excimer laser gas the expiration date is critical. This is confirmed by higher firing voltages, (bad) required with old excimer mix.
<br>
<br>
As in the case of eximcer gas, acid gases react with steel cylinder walls. I would argue smaller cylinders, with a larger surface-to-volume ratio exacerbate this situation. This, along with the often higher price for smaller cylinders is another argument against
"smaller is better (safer)" when discussing reactive gas cylinders. <br>
<br>
In the case of diborane, its stability vs. time is influenced by its percentage and the diluent it is mixed with. From memory diborane's equilibrium is better in H2 than in SiH4. When, after years of use, plumbing for a diborane delivery line is reviewed, one
sees the higher order borane polymers coating surfaces. This is an argument to routine evacuate the gas-stick (valves, mfc, P xducer, etc.) post deposition.<br>
<br>
Bob Hamilton <br>
<br>
<br>
<o:p></o:p></p>
<pre style="margin-left:.5in">-- <o:p></o:p></pre>
<pre style="margin-left:.5in">Robert Hamilton<o:p></o:p></pre>
<pre style="margin-left:.5in">University of California at Berkeley<o:p></o:p></pre>
<pre style="margin-left:.5in">Marvell NanoLab<o:p></o:p></pre>
<pre style="margin-left:.5in">Equipment Eng. Mgr.<o:p></o:p></pre>
<pre style="margin-left:.5in">Room 520 Sutardja Dai Hall<o:p></o:p></pre>
<pre style="margin-left:.5in">Berkeley, CA 94720-1754<o:p></o:p></pre>
<pre style="margin-left:.5in"><a href="mailto:bob@eecs.berkeley.edu">bob@eecs.berkeley.edu</a><o:p></o:p></pre>
<pre style="margin-left:.5in">Phone: 510-809-8600<o:p></o:p></pre>
<pre style="margin-left:.5in">Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred<o:p></o:p></pre>
<p class="MsoNormal" style="mso-margin-top-alt:0in;margin-right:0in;margin-bottom:12.0pt;margin-left:.5in">
<o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">On 1/9/2015 11:47 PM, Kamal Yadav wrote:<o:p></o:p></p>
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<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<p style="margin-left:.5in">Hi, <o:p></o:p></p>
<p style="margin-left:.5in">I was also trying to find the affects of<br>
expiration of NH3 and Diborane in Hydrogen and silane. <o:p></o:p></p>
<p style="margin-left:.5in">In pure gases it does not matter and you can use after expiration we have used 6 years post expiration for NH3. When we changed new cylinder process did not improve... So it does not matter.
<o:p></o:p></p>
<p style="margin-left:.5in">In Diborane mixtures or similar I have been told that the ratio is not maintained post expiration..
<o:p></o:p></p>
<p style="margin-left:.5in">Thanks, <br>
Kamal <br>
IITBNF <o:p></o:p></p>
<div>
<p class="MsoNormal" style="margin-left:.5in">On Jan 10, 2015 3:45 AM, "Himmer, Phil" <<a href="mailto:PhilH@ee.montana.edu">PhilH@ee.montana.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">Hello<o:p></o:p></p>
</div>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">Thanks to all for your input about the expired gas. The general consensus is that expiration dates are not relevant for process stability so I’ll continue using what I have. <o:p></o:p></p>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<div>
<p class="MsoNormal" style="margin-left:.5in">regards<o:p></o:p></p>
</div>
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<p class="MsoNormal" style="margin-left:.5in">phil<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">Dr. Phillip Himmer<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">Manager Montana Microfabrication Facility<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">Montana State University<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">Bozeman Mt 59717<o:p></o:p></p>
</div>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">Office Ph: <a href="tel:406-994-7178" target="_blank">
406-994-7178</a><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">email: <a href="mailto:philh@ece.montana.edu" target="_blank">
philh@ece.montana.edu</a><o:p></o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">On Jan 7, 2015, at 2:44 PM, Janney, Peter J. <<a href="mailto:janney.9@osu.edu" target="_blank">janney.9@osu.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal" style="margin-left:.5in"><br>
<br>
<o:p></o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">It's my understanding that the gas doesn't really expire, it's only the certification on the tank. <o:p></o:p></p>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
</div>
<p class="MsoNormal" style="margin-left:.5in">-- <o:p></o:p></p>
<div>
<p class="MsoNormal" style="margin-left:.5in">Pete Janney<o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:0in;margin-right:0in;margin-bottom:12.0pt;margin-left:.5in">
<o:p> </o:p></p>
<div>
<p class="MsoNormal" style="margin-left:.5in">-------- Original message --------<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">From: "Himmer, Phil" <o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">Date:01/07/2015 2:14 PM (GMT-05:00)
<o:p></o:p></p>
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<div>
<p class="MsoNormal" style="margin-left:.5in">To: <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">
labnetwork@mtl.mit.edu</a> <o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">Subject: [labnetwork] expired process gas
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">Hello, <o:p></o:p></p>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">Does anyone have any practical experience using Chlorine and Hydrogen Bromide gas past it’s expiration date? We use the gas for ICP etching of chrome and aluminum.<o:p></o:p></p>
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<div>
<p class="MsoNormal" style="margin-left:.5in">We have small cylinders(air liquide 7-size) of each that still have gas in them but are now years past the expiration date. I have pulled them from the gas cabinet with the plan to replace them but am having difficulty
finding a vendor who offers these gasses in these small volumes. We are trying to not use lecture bottles due to disposal considerations.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">looking forward to suggestions<o:p></o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">phil<o:p></o:p></p>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-left:.5in">Dr. Phillip Himmer<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">Manager Montana Microfabrication Facility<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">Montana State University<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">Bozeman Mt 59717<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">Office Ph: <a href="tel:406-994-7178" target="_blank">
406-994-7178</a><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-left:.5in">email: <a href="mailto:philh@ece.montana.edu" target="_blank">
philh@ece.montana.edu</a><o:p></o:p></p>
</div>
</div>
</div>
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<br>
<o:p></o:p></p>
<pre style="margin-left:.5in">-- <o:p></o:p></pre>
<pre style="margin-left:.5in">Robert Hamilton<o:p></o:p></pre>
<pre style="margin-left:.5in">University of California at Berkeley<o:p></o:p></pre>
<pre style="margin-left:.5in">Marvell NanoLab<o:p></o:p></pre>
<pre style="margin-left:.5in">Equipment Eng. Mgr.<o:p></o:p></pre>
<pre style="margin-left:.5in">Room 520 Sutardja Dai Hall<o:p></o:p></pre>
<pre style="margin-left:.5in">Berkeley, CA 94720-1754<o:p></o:p></pre>
<pre style="margin-left:.5in"><a href="mailto:bob@eecs.berkeley.edu">bob@eecs.berkeley.edu</a><o:p></o:p></pre>
<pre style="margin-left:.5in">Phone: 510-809-8600<o:p></o:p></pre>
<pre style="margin-left:.5in">Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred<o:p></o:p></pre>
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