<div dir="ltr"><div><div>John,<br><br></div>It is a terrible idea and I wonder why they would want to do that.  A number of fabs across the country (including mine) decided that RO water was not adequate to generate the cleanroom humidification steam so they use DI water instead. Close attention must be paid to the materials used for the piping carrying the "clean" water, steam generation, steam "transport", steam dispersion, steam condensate collection and drainage. <br><br></div>Iulian<br></div><div class="gmail_extra"><br><div class="gmail_quote">On Wed, Feb 4, 2015 at 5:22 PM, John Nicholson <span dir="ltr"><<a href="mailto:thejohnnicholson@gmail.com" target="_blank">thejohnnicholson@gmail.com</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex"><div dir="ltr"><div><div><div>Hello all,<br></div>       We are currently in a design review process for a new class 1000 clean room on campus and the design architects have come up with a scheme that mixes RO steam with the existing building steam (containing softeners and whatever minerals the local city water has) to humidify the clean room. I am of the opinion this is a bad idea. Your opinions would be greatly appreciated as well as references to any design standards (ASHRAE?) you may know of for this type of humidification system.<br></div><div><br>Regards,<br></div></div>John<span class="HOEnZb"><font color="#888888"><br><br><div><div><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none">--<span> </span></span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px"><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none">John Nicholson</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px"><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none">Nanofabrication Laboratories Manager</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px"><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none">MassNanoTech Nanofabrication Facility</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px"><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none">Conte Center for Polymer Research, Rm. B111</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px"><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none">University of Massachusetts Amherst</span><br style="color:rgb(33,33,33);font-family:monosp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<br></blockquote></div><br><br clear="all"><br>-- <br><div class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div>iulian Codreanu, Ph.D.<br>Director of Operations, UD Nanofab<br></div>163 ISE Lab<br><div>Newark, DE 19716<br>302-831-2784<br></div><div><a href="http://udnf.udel.edu" target="_blank">http://udnf.udel.edu</a><br></div></div></div></div></div>
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