<html><head><meta http-equiv="Content-Type" content="text/html charset=utf-8"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">John,<div class=""><br class=""></div><div class="">Echoing everyone else: DI should be used for humidification. Campus steam loops are full of amines. Here’s a quick link to an article on what’s used and why you wouldn’t want trace amounts of it in your cleanroom:</div><div class=""><br class=""></div><div class=""><a href="http://www.momar.com/blog/12/The_Basics_of_Neutralizing_Amines_in_Steam_Line_Treatment" class="">http://www.momar.com/blog/12/The_Basics_of_Neutralizing_Amines_in_Steam_Line_Treatment</a></div><div class=""><br class=""></div><div class="">Also, if you work with sensitive chemically amplified resists, amine contamination decreases resist sensitivity [ref link below, slide #15]. </div><div class=""><br class=""></div><div class=""><a href="http://web.eecs.umich.edu/~peicheng/teaching/EECS598_06_Winter/Lecture 18 - Mar 16.pdf" class="">http://web.eecs.umich.edu/~peicheng/teaching/EECS598_06_Winter/Lecture%2018%20-%20Mar%2016.pdf</a></div><div class=""><br class=""></div><div class="">I hope this helps.</div><div class=""><br class=""></div><div class="">Best,</div><div class="">Noah Clay</div><div class=""><br class=""></div><div class=""><i class="">Quattrone Nanofabrication Facility</i></div><div class=""><i class="">School of Engineering & Applied Sciences</i></div><div class=""><i class="">University of Pennsylvania</i></div><div class=""><i class="">Philadelphia, PA</i></div><div class=""><br class=""></div><div class=""><br class=""><div><blockquote type="cite" class=""><div class="">On Feb 4, 2015, at 8:12 PM, Iulian Codreanu <<a href="mailto:codreanu@udel.edu" class="">codreanu@udel.edu</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><div dir="ltr" class=""><div class=""><div class="">John,<br class=""><br class=""></div>It is a terrible idea and I wonder why they would want to do that. A number of fabs across the country (including mine) decided that RO water was not adequate to generate the cleanroom humidification steam so they use DI water instead. Close attention must be paid to the materials used for the piping carrying the "clean" water, steam generation, steam "transport", steam dispersion, steam condensate collection and drainage. <br class=""><br class=""></div>Iulian<br class=""></div><div class="gmail_extra"><br class=""><div class="gmail_quote">On Wed, Feb 4, 2015 at 5:22 PM, John Nicholson <span dir="ltr" class=""><<a href="mailto:thejohnnicholson@gmail.com" target="_blank" class="">thejohnnicholson@gmail.com</a>></span> wrote:<br class=""><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex"><div dir="ltr" class=""><div class=""><div class=""><div class="">Hello all,<br class=""></div> We are currently in a design review process for a new class 1000 clean room on campus and the design architects have come up with a scheme that mixes RO steam with the existing building steam (containing softeners and whatever minerals the local city water has) to humidify the clean room. I am of the opinion this is a bad idea. Your opinions would be greatly appreciated as well as references to any design standards (ASHRAE?) you may know of for this type of humidification system.<br class=""></div><div class=""><br class="">Regards,<br class=""></div></div>John<span class="HOEnZb"><font color="#888888" class=""><br class=""><br class=""><div class=""><div class=""><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none" class="">--<span class=""> </span></span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px" class=""><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none" class="">John Nicholson</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px" class=""><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none" class="">Nanofabrication Laboratories Manager</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px" class=""><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none" class="">MassNanoTech Nanofabrication Facility</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px" class=""><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none" class="">Conte Center for Polymer Research, Rm. B111</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px" class=""><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none" class="">University of Massachusetts Amherst</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px" class=""><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none" class="">120 Governor's Drive</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px" class=""><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none" class="">Amherst,MA 01003-9305</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px" class=""><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none" class="">Phone: 413-545-2772</span><br style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px" class=""><span style="color:rgb(33,33,33);font-family:monospace;font-size:13px;font-style:normal;font-variant:normal;font-weight:normal;letter-spacing:normal;line-height:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;background-color:rgb(247,247,247);display:inline!important;float:none" class="">Fax: 413-577-0165</span><br class=""></div></div></font></span></div>
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<br class=""></blockquote></div><br class=""><br clear="all" class=""><br class="">-- <br class=""><div class="gmail_signature"><div dir="ltr" class=""><div class=""><div dir="ltr" class=""><div class="">iulian Codreanu, Ph.D.<br class="">Director of Operations, UD Nanofab<br class=""></div>163 ISE Lab<br class=""><div class="">Newark, DE 19716<br class="">302-831-2784<br class=""></div><div class=""><a href="http://udnf.udel.edu/" target="_blank" class="">http://udnf.udel.edu</a><br class=""></div></div></div></div></div>
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