<div dir="ltr">Dear John and Jeffrey,<div><br></div><div>Thanks for your reply. We also use Iron Oxide plates. It looks like both are same performance and Iron oxide has an added advantage in alignment for it being transparent.</div><div><br></div><div>Thanks a lot!</div></div><div class="gmail_extra"><br><div class="gmail_quote">On Tue, Feb 10, 2015 at 8:51 PM, Grau, Jeffrey <span dir="ltr"><<a href="mailto:jeffg@illinois.edu" target="_blank">jeffg@illinois.edu</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d">Hello Kamal,<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"> My name is Jeff Grau and I am the Research Engineer at the University of Illinois. I have been involved in Photolithography for over 35 years.
The most significant difference between Chrome and Iron Oxide masks is the ability to see through the Iron Oxide. This proves to be most beneficial when aligning the photomask. At extremely high magnification, one might see sharper edge quality on the Chrome
photomask, but taking into account the see-through ability of the Iron Oxide mask, this is a small trade off. You mention chrome masks being more expensive than Iron Oxide. Here in the States, the opposite is true. The cost difference between Iron Oxide and
Chrome is approximately double.<u></u><u></u></span></p><span class="">
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"> Roughly, 98 percent of all the photomasks being generated here at the University of Illinois are generated on Iron Oxide.
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"> I hope this helps….Jeff<u></u><u></u></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> <a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Kamal Yadav<br>
<b>Sent:</b> Tuesday, February 10, 2015 4:17 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Iron Oxide vs Chrome Mask plates<u></u><u></u></span></p>
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<p class="MsoNormal">Dear All,<u></u><u></u></p><div><div class="h5">
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<p class="MsoNormal">Is iron oxide superior or inferior to Chrome mask plates in resolution, sharp edges etc. Chrome mask plates are little more costly. But are Chrome PR coated mask plates in anyway better than PR Iron oxide plates?<br clear="all">
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<p class="MsoNormal">Thanks a lot!<u></u><u></u></p>
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<p class="MsoNormal">-- <u></u><u></u></p>
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<p class="MsoNormal">Thanks,<u></u><u></u></p>
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<p class="MsoNormal">Kamal Yadav<u></u><u></u></p>
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<p class="MsoNormal">Sr. Process Technologist<u></u><u></u></p>
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<p class="MsoNormal">IITBNF, EE Department, Annexe,<u></u><u></u></p>
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<p class="MsoNormal">IIT Bombay, Powai<u></u><u></u></p>
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<p class="MsoNormal">Mumbai 400076<u></u><u></u></p>
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<p class="MsoNormal">Internal: 4435<u></u><u></u></p>
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<p class="MsoNormal">Cell: 7506144798<u></u><u></u></p>
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<p class="MsoNormal">Email: <a href="mailto:kamal.yadav@gmail.com" target="_blank">
kamal.yadav@gmail.com</a>, <a href="mailto:kamalyadav@ee.iitb.ac.in" target="_blank">
kamalyadav@ee.iitb.ac.in</a><u></u><u></u></p>
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</blockquote></div><br><br clear="all"><div><br></div>-- <br><div class="gmail_signature"><div dir="ltr"><div>Thanks,<br></div><div>Kamal Yadav</div><div>Sr. Process Technologist<br></div><div>IITBNF, EE Department, Annexe,</div><div>IIT Bombay, Powai</div><div>Mumbai 400076</div><div>Internal: 4435</div><div>Cell: 7506144798</div><div>Email: <a href="mailto:kamal.yadav@gmail.com" target="_blank">kamal.yadav@gmail.com</a>, <a href="mailto:kamalyadav@ee.iitb.ac.in" target="_blank">kamalyadav@ee.iitb.ac.in</a></div></div></div>
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