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<p class="MsoNormal">I have been using Strem Chemicals and Sigma Aldrich. Strem chemicals are flexible in filling in any type of cylinders.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">With all the conversation that I am following, I don’t have experience in transferring TMA from the bottle to the ALD cylinders. But other precursor materials I was able to transfer to the cylinders.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Do you guys have any procedure on how you transfer the TMA in glove box. Due to the pyrophoric property, I am worried that TMA might explode if not handled in the correct method, I do have heard accidents happened when using TMA in glove
box.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">--Thanks <o:p></o:p></p>
<p class="MsoNormal">--Shiva<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Shivakumar Bhaskaran<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Searle CleanRoom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">The University of Chicago<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">5735 S.Ellis, Room 032<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Chicago-60637<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Ph:773-795-2297<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">https://searle-cleanroom.uchicago.edu/<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Hathaway, Malcolm<br>
<b>Sent:</b> Thursday, February 12, 2015 12:02 PM<br>
<b>To:</b> Mark Heiden; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Cambridge ALD Precursor Vendor<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Hi Mark,<br>
<br>
Echoing the comments from others...<br>
<br>
Strem Chemical of Newburyport, MA is our preferred vendor for most of our precursors, including TMA. They have it in "Cambridge" style cylinders.
<br>
<br>
As it happens, we fill our own, with a glove box. Empty cylinders can be purchased in 3 pieces (cylinder, VCR weldment, and VCR nut) from Swagelok, for much cheaper than Strem and Sigma will sell them for. We just have our gas plumbing guys (New England Orbital)
do a quick orbital weld and test them, and we're good to go, for about... $150-$200, as I recall...<br>
<br>
Mac<br>
Harvard CNS<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [labnetwork-bounces@mtl.mit.edu] on behalf of Mark Heiden [mheiden@engr.ucr.edu]<br>
<b>Sent:</b> Wednesday, February 11, 2015 6:11 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Cambridge ALD Precursor Vendor</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable..<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Thanks in advance,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Mark Heiden<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">NanoFab Cleanroom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Center for Nanoscale Science and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">University of California, Riverside<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">951-827-2551<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
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