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<font face="Times New Roman, Times, serif">Hello All,<br>
<br>
Given that many readers of this list-server are not familiar with
some of these materials, let me point out that most ALD precursors
are moisture sensitive (decomposes, smolders, "goes bad" in
contact with room air) as they are intended to react quickly,
typically with water, or other oxidizers. Some, like TMA
(trimethyl aluminum, for Al2O3) and DEZ (diethyl zinc, for ZnO)
are pyrophoric, and <i>will </i>burst into flame if exposed to
air.<br>
<br>
While some precursors can, without injury, be transferred in a
regular fume hood, I don't do this anymore, since they can still
decompose to some extent, without actually killing you. Others,
don't even try it, or the bad day will happen right then and
there.<br>
<br>
That said, I will email regarding transfer techniques in a later
post, as I must run for the train just now!<br>
<br>
<br>
Mac<br>
<br>
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<br>
On 2/12/2015 4:37 PM, Shivakumar Bhaskaran wrote:
<blockquote
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<p class="MsoNormal">I have been using Strem Chemicals and Sigma
Aldrich. Strem chemicals are flexible in filling in any type
of cylinders.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">With all the conversation that I am
following, I don’t have experience in transferring TMA from
the bottle to the ALD cylinders. But other precursor materials
I was able to transfer to the cylinders.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Do you guys have any procedure on how you
transfer the TMA in glove box. Due to the pyrophoric property,
I am worried that TMA might explode if not handled in the
correct method, I do have heard accidents happened when using
TMA in glove box.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">--Thanks <o:p></o:p></p>
<p class="MsoNormal">--Shiva<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;font-family:"Times New
Roman",serif">Shivakumar Bhaskaran<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;font-family:"Times New
Roman",serif">Searle CleanRoom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;font-family:"Times New
Roman",serif">The University of Chicago<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;font-family:"Times New
Roman",serif">5735 S.Ellis, Room 032<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;font-family:"Times New
Roman",serif">Chicago-60637<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;font-family:"Times New
Roman",serif">Ph:773-795-2297<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.0pt;font-family:"Times New
Roman",serif"><a class="moz-txt-link-freetext" href="https://searle-cleanroom.uchicago.edu/">https://searle-cleanroom.uchicago.edu/</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b>
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>
[<a class="moz-txt-link-freetext" href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Hathaway, Malcolm<br>
<b>Sent:</b> Thursday, February 12, 2015 12:02 PM<br>
<b>To:</b> Mark Heiden; <a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Cambridge ALD Precursor
Vendor<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span
style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Hi
Mark,<br>
<br>
Echoing the comments from others...<br>
<br>
Strem Chemical of Newburyport, MA is our preferred vendor
for most of our precursors, including TMA. They have it
in "Cambridge" style cylinders.
<br>
<br>
As it happens, we fill our own, with a glove box. Empty
cylinders can be purchased in 3 pieces (cylinder, VCR
weldment, and VCR nut) from Swagelok, for much cheaper
than Strem and Sigma will sell them for. We just have our
gas plumbing guys (New England Orbital) do a quick orbital
weld and test them, and we're good to go, for about...
$150-$200, as I recall...<br>
<br>
Mac<br>
Harvard CNS<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><b><span
style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">From:</span></b><span
style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">
<a moz-do-not-send="true"
href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>
[<a class="moz-txt-link-abbreviated" href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>] on behalf of Mark
Heiden [<a class="moz-txt-link-abbreviated" href="mailto:mheiden@engr.ucr.edu">mheiden@engr.ucr.edu</a>]<br>
<b>Sent:</b> Wednesday, February 11, 2015 6:11 PM<br>
<b>To:</b> <a moz-do-not-send="true"
href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Cambridge ALD Precursor
Vendor</span><span
style="font-size:12.0pt;font-family:"Times New
Roman",serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Has
anyone found an alternate vendor for precursors
packaged for Cambridge Labs ALD systems besides
Sigma Aldrich?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">We
currently have a delivery date for a standard
aluminum (TMAH) cartridge that is in June 2015. Not
acceptable..<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Thanks in
advance,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Mark
Heiden<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">NanoFab
Cleanroom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Center
for Nanoscale Science and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">University
of California, Riverside<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">951-827-2551<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"> <o:p></o:p></span></p>
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