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w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
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/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
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panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
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font-family:"Calibri",sans-serif;
color:windowtext;}
span.EmailStyle18
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font-family:"Calibri",sans-serif;
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
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<p class="MsoNormal">I use yellow filter in my microscope. Our users inspect the photoresists coated wafer with yellow filters.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a href="http://www.olympusmicro.com/primer/photomicrography/ccfilters/ccyellow.html"><span style="color:windowtext">http://www.olympusmicro.com/primer/photomicrography/ccfilters/ccyellow.html</span></a><o:p></o:p></p>
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<p class="MsoNormal">--Shiva<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Shivakumar Bhaskaran, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Searle CleanRoom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">The University of Chicago<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">5735 S.Ellis, Room 032<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Chicago-60637<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">Ph:773-795-2297<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Times New Roman",serif">https://searle-cleanroom.uchicago.edu/<o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Morrison, Richard H., Jr.<br>
<b>Sent:</b> Tuesday, March 03, 2015 5:21 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] resist fluoresce<o:p></o:p></p>
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<p class="MsoNormal">Hi Everyone,<o:p></o:p></p>
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<p class="MsoNormal">I am trying to figure out what wavelength I need for a Microscope to see positive resist fluoresce during an inspection step? Looking for scum and really thin resist on the surface after development.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Draper Laboratory<o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">Group Leader Microfabrication Operations<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge Ma, 02139-3563<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a href="http://www.draper.com">www.draper.com</a><o:p></o:p></p>
<p class="MsoNormal"><a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><o:p></o:p></p>
<p class="MsoNormal">W 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">C 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended
recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
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