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<font face="Times New Roman, Times, serif">Hi Rick,<br>
<br>
That's definitely arcing. Question is, when is it occurring...
It's been a while since I worked with electrostatic chucks, but as
I recall, you can build up static charges on fully covered wafers,
during plasma processes. </font><font face="Times New Roman,
Times, serif">The problems we used to see were that the wafer
would stick along one edge when the lifter pins came up, and I
think we could even see the arcing at the point of contact when
the wafer finally "unstuck".</font><font face="Times New Roman,
Times, serif"> <br>
<br>
Do these wafers have oxide on both sides?.... Also, is there a
window where you can watch the wafer during de-chucking?<br>
<br>
What we used to do, if I remember correctly, was to run a weak
argon (?) plasma at the end of the etch, which we called the
"dechuck" step. It took a bit of tuning to get it right. You
could even try keeping it on while the pins are coming up, to
allow a discharge path behind the wafer, but that will be a
function of your software, and hardware interlocks. Lastly,
sometimes this problem goes away if you just give the dechuck step
more time, to allow excess static charge to bleed off.<br>
<br>
As I say, it was a while ago, so there may be more recent
approaches to incomplete dechucking that I'm not aware of.<br>
<br>
<br>
Mac<br>
<br>
</font>
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On 3/4/2015 7:08 AM, Morrison, Richard H., Jr. wrote:
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<p class="MsoNormal">Hi everyone,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have a strange problem that I need some
help with. We have an Ulvac NE-550 RIE system with an
electrostatic chuck. The wafer is a double sided polish with
1um of SiO2. One side has an AZ4620 resist pattern 8um thick
to etch the 1um of oxide. Because the process runs hot we
break the etch into 9 different steps and move into the LL
after every step. On the polished side that is down on the ESC
check we have craters on the surface that look like a
lightning strike or meteor strike, this is fairly deep several
microns.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have attached a photo of the damage. Have
any of you seen anything like this? I need to fix the issue
because the side that is down ends up being the frontside of
the wafer and that is a killer defect. We think the oxide is
charging and when the lift pins come up (at ground potential)
we get a discharge.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Draper Laboratory<o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">Group Leader Microfabrication Operations<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge Ma, 02139-3563<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a class="moz-txt-link-abbreviated" href="http://www.draper.com">www.draper.com</a><o:p></o:p></p>
<p class="MsoNormal"><a class="moz-txt-link-abbreviated" href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><o:p></o:p></p>
<p class="MsoNormal">W 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">C 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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