<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 14 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri","sans-serif";
color:windowtext;}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri","sans-serif";}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple">
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<p class="MsoNormal">Hi everyone – <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">For a traditional thermal oxidation furnace, for things like building gate oxides, the general practice is to do a pre-furnace clean using piranha, RCA 1, RCA 2, and HF in successive cleanings beforehand. I was wondering for other academic
cleanrooms following this practice what rules do you have in place for once the students clean their samples and how long they can store these samples before putting into the oxidation furnace. Let’s assume that the students redo the HF dip to remove the
native oxide layer that has reformed, and they stored the samples in a clean container in a N2 dry box inside the cleanroom. Do you require them to put the sample in the oxidation furnace immediately after pre-furnace clean? 1 day? 1 week? Also, if you do
have a specific rule for this do you have any cleanliness data to back it up? Thank you ahead of time for your insightful responses!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Kurt<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">---------------------------------------------------<o:p></o:p></p>
<p class="MsoNormal">Kurt Kupcho<o:p></o:p></p>
<p class="MsoNormal">Microelectronics Engineer<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">WCAM<o:p></o:p></p>
<p class="MsoNormal">1550 Engineering Drive<o:p></o:p></p>
<p class="MsoNormal">ECB Room 3110<o:p></o:p></p>
<p class="MsoNormal">Madison, WI 53706<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">E: <a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a><o:p></o:p></p>
<p class="MsoNormal">T: 608-262-2982<o:p></o:p></p>
<p class="MsoNormal">F: 608-265-2614<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><img border="0" width="328" height="62" id="Picture_x0020_1" src="cid:image002.png@01D0618C.0A1C58D0" alt="http://wcam.engr.wisc.edu/logos/pics/wcam420x80.png"><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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