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<p class="MsoNormal">I would like to thank everyone who responded to my general inquiry on tool vendors for DRIE tool. After a very lengthily review of references and etch test we elected to purchase a Rapier tool from SPTS. If any of you wants to go into this
deeper send me an email off the lab-net list and I can respond. Your candid responses to my question were very helpful.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Again thanks for your help.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Draper Laboratory<o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">Group Leader Microfabrication Operations<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge Ma, 02139-3563<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">www.draper.com<o:p></o:p></p>
<p class="MsoNormal">rmorrison@draper.com<o:p></o:p></p>
<p class="MsoNormal">W 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">C 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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