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<p class="MsoNormal"><span style="color:#1F497D">We use a TC vacuum gage with a digital readout, we have not experienced the issue you talk about.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Principal Member of the Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Group Leader Microfabrication Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">555 Technology Square<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">www.draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">rmorrison@draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">W 617-258-3420<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Paolini, Steven<br>
<b>Sent:</b> Tuesday, March 31, 2015 4:26 PM<br>
<b>To:</b> Fab Network (labnetwork@mtl.mit.edu)<br>
<b>Subject:</b> [labnetwork] Convectron gauges<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Greeting fellow Nanofabbers,<o:p></o:p></p>
<p class="MsoNormal"> Has anyone experienced frequent failures of convectron style vacuum gauges in a Xenon Difluoride etcher? I chose to use this style because it is important for us to observe vacuum over a wide range for this process, but within 10 hours
of running time, the readout displays “bad sensor” or the gauge will not read above 3 Torr. I have been using a major vacuum component supplier’s version of a popular manufacturer’s gauge and we have an isolation valve that closes during process. I suspect
residual XeF2 is the culprit but I would like to hear from the community if there have been similar failures.<o:p></o:p></p>
<p class="MsoNormal">Thanks!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt"><a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt"><a href="http://www.cns.fas.harvard.edu">www.cns.fas.harvard.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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