<html><head><meta http-equiv="Content-Type" content="text/html charset=us-ascii"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">Hi Tom. I have done *<b class="">evaporated</b>* ZnS in a *<b class="">non-loadlocked</b>* eveporator. The evaporation worked, but a few months after that, the evaporator was found to be<b class=""> trash</b> - apparently a significant amount of H2SO4 is formed by the interaction of moist lab air with freshly-deposited ZnS. This may or may not be an issue for a good loadlocked sputtering system. Better safe than sorry...<div class=""><br class=""></div><div class="">--Mike<br class=""><div class=""><br class=""></div><div class=""><br class=""><div><blockquote type="cite" class=""><div class="">On Apr 1, 2015, at 10:21 AM, Ferraguto, Thomas <<a href="mailto:Thomas_Ferraguto@uml.edu" class="">Thomas_Ferraguto@uml.edu</a>> wrote:</div><br class="Apple-interchange-newline"><div class="">Colleagues,<br class=""><br class="">I have a customer who wants to use YF3 (Yttrium Fluoride) , Y2O3 (Yttrium Oxide), ZnS (Zinc Sulfide) , in our Lesker Sputter tool. It's a new lab line load lock tool (DC, DC-Pulse and RF)<br class=""><br class="">Does anyone have a "Red Flags" for these materials? (I just don't have experience with these specifically)<br class=""><br class="">Thanks<br class="">Tom<br class=""><br class=""><br class="">Thomas S. Ferraguto<br class="">Saab ETIC Nanofabrication Laboratory Director<br class="">University of Massachusetts Lowell<br class="">1 University Avenue<br class="">Lowell MA 01854-5120<br class="">978-934-1809 land<br class="">617-755-0910 mobile<br class="">978-934-1014 fax<br class=""><br class=""><br class=""></div></blockquote></div><br class=""><div apple-content-edited="true" class="">
<div style="color: rgb(0, 0, 0); letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">-- <br class=""><font face="Consolas" class=""><span style="font-size: 11px;" class="">Michael P. Young (574) 631-3268 (office)<br class="">Nanofabrication Specialist (574) 631-4393 (fax)<br class="">Department of Electrical Engineering (765) 637-6302 (cell)<br class="">University of Notre Dame <a href="mailto:mike.young@nd.edu" class="">mike.young@nd.edu</a><br class="">B-38 Stinson-Remick Hall<br class="">Notre Dame, IN 46556-5637</span></font></div>
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