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</o:shapelayout></xml><![endif]--></head><body lang=EN-CA link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Times New Roman","serif";color:blue'>Hello Steve,<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Times New Roman","serif";color:blue'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Times New Roman","serif";color:blue'>I had the same problem with a CF4 etcher. The gauge manufacturer told me that fluorine attacks the coating on the filament.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Times New Roman","serif";color:blue'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Times New Roman","serif";color:blue'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Times New Roman","serif";color:blue'>Regards,<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Times New Roman","serif";color:blue'>Philip<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Times New Roman","serif";color:blue'><o:p> </o:p></span></p><div><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Arial","sans-serif";color:blue'>_________________________</span><span style='color:blue'><o:p></o:p></span></p><p class=MsoNormal><span style='color:blue'> <o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Arial","sans-serif";color:blue'>Philip Kubik, Ph.D.<br>Staff Scientist<br>4D Labs, Simon Fraser University<br>8888 University Dr.<br>Burnaby, BC, Canada V5A 1S6<br>Office phone: 778-782-9818</span><span style='color:blue'><o:p></o:p></span></p><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Arial","sans-serif";color:blue'>Email: </span><span style='color:blue'><a href="mailto:Philip.Kubik@4DLabs.ca"><span style='font-size:10.0pt;font-family:"Arial","sans-serif"'>Kubik@4DLabs.ca</span></a><o:p></o:p></span></p><p class=MsoNormal><span style='color:blue'> </span><span style='color:blue'><o:p></o:p></span></p></div><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Times New Roman","serif";color:blue'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span lang=EN-US style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span lang=EN-US style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Paolini, Steven<br><b>Sent:</b> March 31, 2015 13:26<br><b>To:</b> Fab Network (labnetwork@mtl.mit.edu)<br><b>Subject:</b> [labnetwork] Convectron gauges<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span lang=EN-US>Greeting fellow Nanofabbers,<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US> Has anyone experienced frequent failures of convectron style vacuum gauges in a Xenon Difluoride etcher? I chose to use this style because it is important for us to observe vacuum over a wide range for this process, but within 10 hours of running time, the readout displays “bad sensor” or the gauge will not read above 3 Torr. I have been using a major vacuum component supplier’s version of a popular manufacturer’s gauge and we have an isolation valve that closes during process. I suspect residual XeF2 is the culprit but I would like to hear from the community if there have been similar failures.<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US>Thanks!<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p><p class=MsoNormal><span lang=EN-US style='font-size:14.0pt'>Steve Paolini<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US style='font-size:14.0pt'>Principal Equipment Engineer<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US style='font-size:14.0pt'>Harvard University Center for Nanoscale Systems<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US style='font-size:14.0pt'>617- 496- 9816<o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US style='font-size:14.0pt'><a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a><o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US style='font-size:14.0pt'><a href="http://www.cns.fas.harvard.edu">www.cns.fas.harvard.edu</a><o:p></o:p></span></p><p class=MsoNormal><span lang=EN-US><o:p> </o:p></span></p></div></body></html>