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<p class="MsoNormal">Hello folks. I have a client that wishes to deposit two materials in our electron beam deposition tool. Our tool is specifically used for typical metal depositions and my concern is chamber contamination, system contamination and cleanup.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">The materials the client wishes to deposit are:<o:p></o:p></p>
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<h1 style="margin:0in;margin-bottom:.0001pt;background:#FDFDFD"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;font-weight:normal">AlQ3 - (</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#403C36;font-weight:normal">Tris-(8-hydroxyquinoline)aluminum
(organic)<o:p></o:p></span></h1>
<p class="MsoNormal">LiF – Lithium Fluoride (inorganic)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Also, please let me know your thoughts in general about the deposition of organic materials in your tools.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Cheers!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Julia Aebersold, Ph.D.<o:p></o:p></p>
<p class="MsoNormal">Cleanroom Manager<o:p></o:p></p>
<p class="MsoNormal">Micro/Nano Technology Center<o:p></o:p></p>
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
<p class="MsoNormal">Shumaker Research Building, Room 233<o:p></o:p></p>
<p class="MsoNormal">2210 South Brook Street<o:p></o:p></p>
<p class="MsoNormal">Louisville, KY 40292<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">502-852-1572<o:p></o:p></p>
<p class="MsoNormal"><a href="http://louisville.edu/micronano/"><span style="color:blue">http://louisville.edu/micronano/</span></a><o:p></o:p></p>
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