<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body dir="auto"><div><div><span style="background-color: rgba(255, 255, 255, 0);">Fouad,</span></div><div><span style="background-color: rgba(255, 255, 255, 0);"><br></span></div><div><span style="background-color: rgba(255, 255, 255, 0);">We have sputtered GaP at the University of Pennsylvania. We let the researchers run on the system for three days and then tore down all shielding and gun hardware, replacing it with spares. We also foil wrapped any exposed surfaces. It was time consuming and costly and the researchers did not try this work again, thankfully. </span></div><div><span style="background-color: rgba(255, 255, 255, 0);"><br></span></div><div><span style="background-color: rgba(255, 255, 255, 0);">We did fingerprint the chamber before and after this with RGA. The shielding and hardware changes indicated no P carry after the work was completed. We also sputtered silver and sent it out for SIMS before and after. Afterwards, this indicated a 1e12 cm-3 level of P in the chamber, up from 1e11 cm-3 beforehand.</span></div><div><span style="background-color: rgba(255, 255, 255, 0);"><br></span></div><div><span style="background-color: rgba(255, 255, 255, 0);">From a safety perspective, we wore cartridge respirators during shielding change. Our assumption was that, as an open load system, P on the chamber walls would be substantially oxidized between runs. <- unlike MBE where the P accumulates and is substantially unreacted. I haven't taken Stat Mech in twenty years, but would guess that P has a greater affinity for O than H.</span></div><div><span style="background-color: rgba(255, 255, 255, 0);"><br></span></div><div><span style="background-color: rgba(255, 255, 255, 0);">Best,</span></div><div><span style="background-color: rgba(255, 255, 255, 0);">Noah Clay</span></div><div><span style="background-color: rgba(255, 255, 255, 0);"><br></span></div><div><span style="background-color: rgba(255, 255, 255, 0);">Quattrone Nanofabrication Facility</span></div><div><span style="background-color: rgba(255, 255, 255, 0);">University of Pennsylvania </span></div><div><span style="background-color: rgba(255, 255, 255, 0);">Philadelphia, PA<br><br>Sent from my iPhone</span></div><div><span style="background-color: rgba(255, 255, 255, 0);"><br></span><font color="#000000"><span style="background-color: rgba(255, 255, 255, 0);">On Jun 4, 2015, at 03:32, Fouad Karouta <<a href="mailto:fouad.karouta@anu.edu.au">fouad.karouta@anu.edu.au</a>> wrote:<br><br></span></font></div><blockquote type="cite"><div class="WordSection1"><div><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Dear colleagues,<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);"> </span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">In our multi-users facility in Canberra we do have a sputter with multiple targets used by our users. One suer would like to sputter GaP on Si to be used for solar cells applications.<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Looking at the MSDS, it stated a certain toxicity related to the element P.<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);"> </span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">I would like to know if anyone is sputtering GaP and what safety rules are taken for example to clean the chamber or just change targets and if there is any potential of forming PH3.<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);"> </span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Best regards,<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Fouad Karouta<o:p></o:p></span></font></p></div><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);"> </span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">*********************************<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Manager ANFF ACT Node<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Australian National Fabrication Facility<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Research School of Physics and Engineering<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Australian National University<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">ACT 0200, Canberra, Australia<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Tel: + 61 2 6125 7174<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Mob: + 61 451 046 412<o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);">Email: <a href="mailto:fouad.karouta@anu.edu.au">fouad.karouta@anu.edu.au</a><o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);"><a href="http://anff-act.anu.edu.au/">http://anff-act.anu.edu.au/</a><o:p></o:p></span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);"> </span></font></p><p class="MsoNormal"><font color="#000000" face="UICTFontTextStyleBody" size="3"><span style="background-color: rgba(255, 255, 255, 0);"> <o:p></o:p></span></font></p></div></blockquote><blockquote type="cite"><font color="#000000"><span style="background-color: rgba(255, 255, 255, 0);">_______________________________________________<br>labnetwork mailing list<br><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a></span></font></blockquote><br>Sent from my iPhone</div><div><br>On Jun 4, 2015, at 03:32, Fouad Karouta <<a href="mailto:fouad.karouta@anu.edu.au">fouad.karouta@anu.edu.au</a>> wrote:<br><br></div><blockquote type="cite"><div>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Dear colleagues,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">In our multi-users facility in Canberra we do have a sputter with multiple targets used by our users. One suer would like to sputter GaP on Si to be used for solar cells
applications.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Looking at the MSDS, it stated a certain toxicity related to the element P.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">I would like to know if anyone is sputtering GaP and what safety rules are taken for example to clean the chamber or just change targets and if there is any potential of
forming PH3.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Best regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Fouad Karouta<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">*********************************<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Manager ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Australian National Fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Research School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Australian National University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">ACT 0200, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Mob: + 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Email:<span style="color:#1F497D">
<a href="mailto:fouad.karouta@anu.edu.au">fouad.karouta@anu.edu.au</a><o:p></o:p></span></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><a href="http://anff-act.anu.edu.au/">http://anff-act.anu.edu.au/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"> <o:p></o:p></span></p>
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</div></blockquote><blockquote type="cite"><div><span>_______________________________________________</span><br><span>labnetwork mailing list</span><br><span><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a></span><br><span><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a></span><br></div></blockquote></body></html>