<html><head><meta http-equiv="Content-Type" content="text/html charset=us-ascii"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">Hi Kamal. At risk of being misunderstood, experience in this field motivates me to respond with a blatant, old Americanism:<div class=""><br class=""></div><div class=""><span class="Apple-tab-span" style="white-space:pre"> </span>--> If it ain't broke, don't fix it! <--</div><div class=""><br class=""></div><div class="">Having said that, you probably already know that most groups/labs segregate CMOS and compound semiconductor processing equipment for this very reason.</div><div class=""><br class=""></div><div class="">Best of luck,</div><div class=""><br class=""></div><div class="">--Mike</div><div class=""><br class=""></div><div class=""><br class=""><div><blockquote type="cite" class=""><div class="">On Jun 5, 2015, at 5:33 AM, Kamal Yadav <<a href="mailto:kamal.yadav@gmail.com" class="">kamal.yadav@gmail.com</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><div dir="ltr" class="">Dear All,<div class=""><br class=""></div><div class="">Though may not make much sense, but would wanted to know if there are any successful cleaning procedures for chamber to remove affect of gold usage/contamination in that chamber.</div><div class=""><br class=""></div><div class="">We want to use the chamber with gold pads exposed to the plasma, but at the same time, need to allow those whose devices may get affected from gold [in CMOS]. Any intermediate cleaning/deposition that could significantly (?) reduce the affect. </div><div class=""><br class=""></div><div class="">Our chamber [ICPCVD] has been used [5+ years] with gold pads [exposed to plasma] <b class="">and so far other groups have not reported any issues with their devices, so its working out fine till now.</b></div><div class=""><br class=""></div><div class="">But we want to take precautionary measures if any.</div><div class=""><br class=""></div><div class="">Thanks a lot!</div><div class=""><div class=""><br class=""></div>-- <br class=""><div class="gmail_signature"><div dir="ltr" class=""><div class=""><div dir="ltr" class=""><div class=""><div dir="ltr" class=""><div dir="ltr" class=""><div class="">Thanks,<br class=""></div><div class="">Kamal Yadav</div><div class="">Sr. Process Technologist</div><div class="">Electrical Engineering</div><div class="">IIT Bombay</div><div class="">Mobile: 7506144798</div></div></div></div></div></div></div></div>
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<div style="color: rgb(0, 0, 0); letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">-- <br class=""><font face="Consolas" class=""><span style="font-size: 11px;" class="">Michael P. Young (574) 631-3268 (office)<br class="">Nanofabrication Specialist (574) 631-4393 (fax)<br class="">Department of Electrical Engineering (765) 637-6302 (cell)<br class="">University of Notre Dame <a href="mailto:mike.young@nd.edu" class="">mike.young@nd.edu</a><br class="">B-38 Stinson-Remick Hall<br class="">Notre Dame, IN 46556-5637</span></font></div>
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