<div dir="ltr">Dear Mike and Others,<div><br></div><div>Thanks for your reply.</div><div>We also have strict policies to promote anti contamination. Policies are structured as per SNF policies. <br></div><div><br></div><div>Mitigation experiment/procedure of any type is not possible, in this case I suppose.</div><div><br></div><div>Thanks a lot!.</div><div><br></div></div><div class="gmail_extra"><br><div class="gmail_quote">On Fri, Jun 5, 2015 at 6:21 PM, Mike Young <span dir="ltr"><<a href="mailto:myoung6@nd.edu" target="_blank">myoung6@nd.edu</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex"><div style="word-wrap:break-word">Hi Kamal. At risk of being misunderstood, experience in this field motivates me to respond with a blatant, old Americanism:<div><br></div><div><span style="white-space:pre-wrap"> </span>--> If it ain't broke, don't fix it! <--</div><div><br></div><div>Having said that, you probably already know that most groups/labs segregate CMOS and compound semiconductor processing equipment for this very reason.</div><div><br></div><div>Best of luck,</div><div><br></div><div>--Mike</div><div><br></div><div><div><div class="h5"><br><div><blockquote type="cite"><div>On Jun 5, 2015, at 5:33 AM, Kamal Yadav <<a href="mailto:kamal.yadav@gmail.com" target="_blank">kamal.yadav@gmail.com</a>> wrote:</div><br><div><div dir="ltr">Dear All,<div><br></div><div>Though may not make much sense, but would wanted to know if there are any successful cleaning procedures for chamber to remove affect of gold usage/contamination in that chamber.</div><div><br></div><div>We want to use the chamber with gold pads exposed to the plasma, but at the same time, need to allow those whose devices may get affected from gold [in CMOS]. Any intermediate cleaning/deposition that could significantly (?) reduce the affect. </div><div><br></div><div>Our chamber [ICPCVD] has been used [5+ years] with gold pads [exposed to plasma] <b>and so far other groups have not reported any issues with their devices, so its working out fine till now.</b></div><div><br></div><div>But we want to take precautionary measures if any.</div><div><br></div><div>Thanks a lot!</div><div><div><br></div>-- <br><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div>Thanks,<br></div><div>Kamal Yadav</div><div>Sr. Process Technologist</div><div>Electrical Engineering</div><div>IIT Bombay</div><div>Mobile: 7506144798</div></div></div></div></div></div></div></div>
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<div style="color:rgb(0,0,0);letter-spacing:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;word-wrap:break-word">-- <br><font face="Consolas"><span style="font-size:11px">Michael P. Young <a href="tel:%28574%29%20631-3268" value="+15746313268" target="_blank">(574) 631-3268</a> (office)<br>Nanofabrication Specialist <a href="tel:%28574%29%20631-4393" value="+15746314393" target="_blank">(574) 631-4393</a> (fax)<br>Department of Electrical Engineering <a href="tel:%28765%29%20637-6302" value="+17656376302" target="_blank">(765) 637-6302</a> (cell)<br>University of Notre Dame <a href="mailto:mike.young@nd.edu" target="_blank">mike.young@nd.edu</a><br>B-38 Stinson-Remick Hall<br>Notre Dame, IN 46556-5637</span></font></div>
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<br></blockquote></div><br><br clear="all"><div><br></div>-- <br><div class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div>Thanks,<br></div><div>Kamal Yadav</div><div>Sr. Process Technologist</div><div>Electrical Engineering</div><div>IIT Bombay</div><div>Mobile: 7506144798</div></div></div></div></div></div></div></div>
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