<div dir="ltr">Dear Noah,<div><br></div><div>Thanks for your reply. I will wait for your feedback.</div><div><br></div><div>I am also looking water systems which are capable of producing ozonized DI water with required/tunable ppm range [1 - 50 ppm]. </div></div><div class="gmail_extra"><br><div class="gmail_quote">On Wed, Jul 15, 2015 at 6:21 PM, Noah Clay <span dir="ltr"><<a href="mailto:nclay@upenn.edu" target="_blank">nclay@upenn.edu</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">Kamal,<br>
<br>
OEM Group has their Cintillio spray ozone tool, which appears to be a great RCA clean alternative. We're hoping to evaluate this system at UPenn in Philadelphia - their Apps Lab is just north of the city. I'll keep you posted.<br>
<br>
Best,<br>
Noah Clay<br>
<br>
Quattrone Nanofabrication Facility<br>
University of Pennsylvania<br>
Philadelphia, PA<br>
<br>
Sent from my iPhone<br>
<div><div class="h5"><br>
> On Jul 15, 2015, at 06:42, Kamal Yadav <<a href="mailto:kamal.yadav@gmail.com">kamal.yadav@gmail.com</a>> wrote:<br>
><br>
> Dear All,<br>
><br>
> Due to it being cost effective I am exploring ozonized DI water, as it can be used in photoresist stripping applications, and can replace several other cleaning procedures [RCA] as well to save money on high purity acid chemicals.<br>
><br>
> If anybody has any experience regarding putting up such system, knowing that would be helpful.<br>
><br>
> --<br>
> Thanks,<br>
> Kamal Yadav<br>
> Sr. Process Technologist<br>
> Electrical Engineering<br>
> IIT Bombay<br>
> Mobile: 7506144798<br>
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</blockquote></div><br><br clear="all"><div><br></div>-- <br><div class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div>Thanks,<br></div><div>Kamal Yadav</div><div>Sr. Process Technologist</div><div>Electrical Engineering</div><div>IIT Bombay</div><div>Mobile: 7506144798</div></div></div></div></div></div></div></div>
</div>