<html><head><meta http-equiv="Content-Type" content="text/html; charset=us-ascii"><meta name="Generator" content="Microsoft Word 12 (filtered medium)"><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
span.EmailStyle19
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:windowtext;}
span.EmailStyle20
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style></head><body lang="EN-US" link="blue" vlink="purple"><div class="WordSection1"><p class="MsoNormal"><span style="color:#1f497d">Hi Hal,</span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><p class="MsoNormal"><span style="color:#1f497d">We work with Toho Technology (<a href="http://www.tohotechnology.com">http://www.tohotechnology.com</a>) for service on our FLX-2320. I believe they own rights to this tool now. Our system already has the 780nm laser. If it was upgraded, it was before my time here.</span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><p class="MsoNormal"><span style="color:#1f497d">My contact is Lan Phan <a href="mailto:lan.phan@tohotechnology.com">lan.phan@tohotechnology.com</a></span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><p class="MsoNormal"><span style="color:#1f497d">Good luck!</span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><p class="MsoNormal"><span style="color:#1f497d">Best Regards,</span></p><p class="MsoNormal"><span style="color:#1f497d">Brian Armstrong</span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><p class="MsoNormal"><span style="color:#1f497d">Lead Engineer in Research</span></p><p class="MsoNormal"><span style="color:#1f497d">Lurie Nanofabrication Facility (LNF)</span><span style="color:#1f497d"></span></p><p class="MsoNormal"><span style="color:#1f497d">University of Michigan<br>1301 Beal Ave, 1245 EECS<br>Ann Arbor, MI 48109-2122</span></p><p class="MsoNormal"><span style="color:#1f497d">Office: (734) 615-7539</span></p><p class="MsoNormal"><span style="color:#1f497d">Cell: (734) 323-0137</span></p><p class="MsoNormal"><span style="color:#1f497d">Fax: (734) 647-1781</span></p><p class="MsoNormal"><span style="color:#1f497d"><a href="http://www.lnf.umich.edu/">http://www.lnf.umich.edu</a></span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><div><div style="border:none;border-top:solid #b5c4df 1.0pt;padding:3.0pt 0in 0in 0in"><p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> <a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>] <b>On Behalf Of </b>Harold Gilles<br><b>Sent:</b> Monday, July 20, 2015 8:09 AM<br><b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><b>Subject:</b> [labnetwork] KLA Tencor FLX 2320 Stress Measurement System</span></p></div></div><p class="MsoNormal"> </p><p class="MsoNormal">All,</p><p class="MsoNormal">The 2320 system uses a 750 laser that will fail and is no longer available. The replacement is a 780 laser. Has anyone gone through the process of upgrading to the 780 laser? Is it simply a hardware change with some adjustment to software parameters or did it require a change/upgrade in software as well? If you had the upgrade done, who did you work with to do it?</p><p class="MsoNormal"> </p><p class="MsoNormal">Thanks in advance, </p><p class="MsoNormal"> </p><p class="MsoNormal"><img border="0" width="466" height="97" id="Picture_x0020_1" src="cid:image001.png@01D0C2F0.66B1EAE0"></p><p class="MsoNormal">Hal Gilles <br>Wisconsin Center For Applied Microelectronics </p><p class="MsoNormal">Office rm 3114<br>608-890-4573</p><p class="MsoNormal"> </p></div></body></html>